Handling robot system for chemical mechanical polishing

Abstract

The invention provides a handling robot system for chemical mechanical polishing, which is characterized in that an actuating mechanism comprises a robot body and a support device, the robot body comprises jaws, jaw turning mechanisms, small arms, large arms and a sleeve, the support device comprises a linear guide slide and a guide screw, a detector is used for detecting operating state parameters of the actuating mechanism to generate detection formation, a control device is used for controlling movement and motional angle of the jaws and comprises an upper computer controller, a master controller, a motion controller, a servo driver, a motor and an encoder, the upper computer controller is used for receiving operational orders input by a user, the encoder is used for detecting corresponding state information of the motor, the master controller is used for generating movement orders for the actuating mechanism, the motion controller is used for calculating motor controlling quantity according to a preset control algorithm, the servo driver is used for calculating corresponding control torques of the motor, and the motor is used for driving the actuating mechanism to move under control of the corresponding control torques.

Description

technical field [0001] The invention relates to the technical field of chemical mechanical polishing, in particular to a chemical mechanical polishing transfer robot system. Background technique [0002] In semiconductor manufacturing equipment, its internal dedicated automatic material handling equipment is a wafer transfer robot. The transfer robot needs to meet the requirements that the transfer speed is synchronized with the rough and finish processing speed, the gripping device does not damage the wafer, does not bring new pollution, and there is no shock and vibration during the transfer. [0003] Due to the requirements of the polishing machine, it is necessary to develop a dedicated transfer robot. Foreign companies and research institutions have achieved fruitful results in the research and development of transmission robots and their key technologies, and formed a complete product system. However, compared with foreign countries, the research and development of d...

AI Technical Summary

Problems solved by technology

However, compared with foreign countries, the research and development of domestic transfer robots is relatively backward, and there are few studies on precision automatic transfer systems.

At present, almost all the automatic transfer systems used in domestic IC production lines are imported from abroad, and domestic transfer robots have a certain gap with the international level in terms of stability, reliability and automation

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