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Device for preparing holographic scan high-density grating based on focus of cylindrical mirror

A technology for preparing devices and cylindrical mirrors, applied to diffraction gratings, instruments, etc., can solve problems such as increasing the complexity of the device, and achieve the effects of convenient grating fringe orientation, good stability, and simple splicing problems

Active Publication Date: 2012-07-11
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the shortcoming of this technology is that the spot of the beam used is Gaussian, so it needs to have a certain degree of superposition of the spot when splicing, and when the superposition of the spot is not only to meet the matching of the laser energy, but also the grating stripe Strict alignment is also required, and the grating field must maintain a high degree of stability, which puts high demands on the lithography process and control technology
In addition, this technology usually requires a precise rotating device to rotate the scanning platform so that the moving direction of the scanning platform is consistent with the direction of the grating stripes, thus increasing the complexity of the device

Method used

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  • Device for preparing holographic scan high-density grating based on focus of cylindrical mirror
  • Device for preparing holographic scan high-density grating based on focus of cylindrical mirror
  • Device for preparing holographic scan high-density grating based on focus of cylindrical mirror

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Embodiment Construction

[0021] The present invention will be further described below in conjunction with the embodiments and accompanying drawings, but the protection scope of the present invention should not be limited thereby.

[0022] see first figure 1 , figure 1 It is the optical path diagram of the preparation device of the holographic scanning high-density grating based on the focus of the cylindrical mirror of the present invention. It can be seen from the figure that the preparation device of the holographic scanning high-density grating based on the focus of the cylindrical mirror of the present invention,

[0023] The device includes a double-beam holographic interference optical path, which is used to generate a high-density grating fringe field; a cylindrical mirror, which can focus a two-dimensional grating field into a one-dimensional high-density lattice; a scanning platform 8, which is used to place a scanning substrate and realize Accurate positioning and scanning movement of the ...

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Abstract

The invention discloses a device for preparing a holographic scan high-density grating based on the focus of a cylindrical mirror. The device comprises a double-beam holographic interference light path, the cylindrical mirror, a scanning platform and an automatic focusing system and consists of an ultraviolet laser, a first semi-transparent semi-reflective mirror, a first reflecting mirror, a second reflecting mirror, a first beam expansion and collimation device, a second beam expansion and collimation device, the cylindrical mirror, the scanning platform, a red light laser, a second semi-transparent semi-reflective mirror, an astigmatic lens and a quadrant detector. By the device, parallel photoetching of the high-density grating can be realized; and the device has the advantages of high stability, high parallelism, high grating processing speed and the like.

Description

technical field [0001] The invention relates to a high-density grating preparation technology, in particular to a holographic scanning high-density grating preparation device based on cylindrical mirror focusing. technical background [0002] As a very basic optical component, the grating device is widely used in the fields of spectral analysis, optical fiber communication, optical measurement, space science, laser demonstration, etc. has very important uses. With the development of science and technology, its application range will be further expanded, and the requirements for grating size and grating performance will be further improved. [0003] At present, the grating production method mainly used in the world is the traditional holographic interference exposure technology, such as the grating commercially produced by the French HORIBA Jobin Yvon company, which basically forms high-density grating stripes through the interference of two beams of parallel light, and then...

Claims

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Application Information

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IPC IPC(8): G03H1/12G02B5/18
Inventor 贾伟周常河俞斌麻健勇王少卿曹红超
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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