Purification device for electronic grade ultra-pure ammonia and electronic grade ultra-pure ammonia automatic online detection device

Abstract

The invention discloses a purification device for electronic grade ultra-pure ammonia. The purification device comprises a liquid ammonia storage tank, a liquid ammonia pump, a vaporizer, an oil remover, a rectification tower, a terminal purifier, a condenser and a product storage tank. The rectification tower includes a first and a second rectification tower. The invention breaks through the limitation of a conventional ultra-pure ammonia purifying process, simplifies the ultra-pure ammonia purifying process, greatly reduces energy consumption of the whole production process, and improves production efficiency. The invention also provides an electronic grade ultra-pure ammonia automatic online detection device for use on the purification device. The detection device comprises an analysissampling assembly and a control system, has short sampling time and can analyze and reflect online product quality condition in shortest time so as to control the whole production process of the product.

Description

Technical field [0001] The invention relates to a special gas purification device and a detection device, in particular to an electronic grade ultrapure ammonia purification device and an automatic online detection device. Background technique [0002] In the existing ultra-pure ammonia purification industrial equipment, the process route adopted is basically similar, such as the electronic-grade ultra-pure ammonia purification and extraction device disclosed in patent CN200920235917.4 and the 7N electronic-grade ultra-purification device mentioned in patent application CN201010140687.0 Purification devices for pure ammonia all use industrial liquid ammonia as raw material, vaporize it through a vaporizer, then remove oil through a degreasing device, then dry and dehydrate through a molecular sieve adsorber, and then directly enter the rectification tower, and the product obtained from rectification is passed through the terminal purifier. The water is removed to obtain the final...

AI Technical Summary

Problems solved by technology

In the existing domestic ultra-pure gas production equipment, the previous gas sampling analysis is still used. This has two major defects. One is that the online purity of the product cannot be reflected in time, so that the quality of the produced product cannot be controlled; During the gas sampling process, the ultra-pure gas sample may be polluted, so that the final test result cannot truly reflect the production, resulting in misjudgment

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