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Method for forming carbon film, method for manufacturing magnetic recording medium, and apparatus for forming carbon film

A technology of carbon film and film forming chamber, which is applied in the direction of manufacturing base layer, disc carrier manufacturing, and only coating a part of the coating supported by a magnetic layer, which can solve problems such as corrosion and reduced reliability of magnetic recording media, and achieve the purpose of suppressing concentration , Increase the concentration of carbon ions and the effect of high plasma density and high recording density

Active Publication Date: 2012-04-25
SHOWA DENKO HD SINGAPORE PTE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

A carbon film with low hardness cannot fully function as a protective film for a magnetic recording medium, and corrosion of the magnetic layer occurs from the edge of the opening, reducing the reliability of the magnetic recording medium

Method used

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  • Method for forming carbon film, method for manufacturing magnetic recording medium, and apparatus for forming carbon film
  • Method for forming carbon film, method for manufacturing magnetic recording medium, and apparatus for forming carbon film
  • Method for forming carbon film, method for manufacturing magnetic recording medium, and apparatus for forming carbon film

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0224] First, as a non-magnetic substrate (hereinafter referred to as a substrate), a disk-shaped substrate (95 mm in outer diameter and 25 mm in diameter of the central opening) having an opening in the center with an outer diameter of 3.5 inches was prepared. NiP aluminum substrate.

[0225] Next, in preparation for Figure 7 In any processing chamber of the shown in-line film forming apparatus, magnetic layers made of FeCoB with a film thickness of 60 nm are sequentially stacked on both surfaces of the substrate mounted on a carrier made of A5052 aluminum alloy. A soft magnetic layer, an intermediate layer made of Ru with a film thickness of 10nm, and a film made of 70Co-5Cr-15Pt-10SiO with a film thickness of 15nm 2 It is made of a recording magnetic layer composed of an alloy.

[0226] Next, prepare for Figure 7 The in-line film forming apparatus shown in the figure is provided with the figure 1 In the processing chamber configured with the same apparatus as the film...

Embodiment 2～12

[0240] Except having set the conditions shown in Table 1, it carried out similarly to Example 1, and produced the magnetic recording medium (Examples 2-12) in which the carbon film was formed. Then, film thickness measurement was carried out in the same manner as in Example 1.

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Abstract

A method for forming a carbon film has a step wherein, in a film-forming chamber, which is provided with a filament-like cathode electrode, an anode electrode provided at the periphery of the cathode electrode and a substrate holder disposed at a position separated from the cathode electrode, a disc-like substrate having a center opening is disposed on a substrate holder with one surface of the substrate facing the cathode electrode, and a columnar member, which has a diameter equivalent to that of the center opening or more and a height equivalent to the diameter of the columnar member or more, is disposed by being spaced apart from the cathode electrode and the substrate such that the center axis is coaxial with the center axis of the substrate, one circular surface faces the cathode electrode and the other circular surface is parallel to the said surface of the substrate. The method also has a step wherein carbon ions are flowed toward the substrate side from the cathode electrode side after releasing the air from the film-forming chamber, and the carbon film is formed on the said surface of the substrate.

Description

technical field [0001] The present invention relates to a method for forming a carbon film, a method for manufacturing a magnetic recording medium, and a device for forming a carbon film. [0002] This application claims priority based on Patent Application No. 2009-124515 for which it applied in Japan on May 22, 2009, and uses the content of the said application in this application. Background technique [0003] In recent years, in the field of magnetic recording media used in hard disk drives (HDDs) and the like, the improvement in recording density has been remarkable. The above-mentioned recording density continues to increase at an astonishing rate, reaching about 100 times in the last 10 years. [0004] The technologies supporting the above-mentioned increase in recording density involve various aspects, and one of the key technologies is the control technology of the sliding characteristics between the magnetic head and the magnetic recording medium. [0005] As one...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G11B5/84C01B31/02C23C16/26C23C16/44
CPCG11B5/855G11B5/8404C23C16/50C23C16/26
Inventor 太田一朗
Owner SHOWA DENKO HD SINGAPORE PTE
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