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Micro-energy system with high weight ratio energy density and method and application thereof

A technology of energy density and weight ratio, applied in the field of microelectronics, can solve problems such as low energy density, achieve space saving, facilitate monolithic integration, and reduce external circuit connections

Inactive Publication Date: 2015-04-22
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The purpose of the present invention is to provide a micro-energy system with a high weight ratio energy density, a manufacturing method and its application. The present invention solves the low energy density of the existing micro-energy system (such as a polymer lithium battery, only 100-200Wh / Kg) The problem

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  • Micro-energy system with high weight ratio energy density and method and application thereof
  • Micro-energy system with high weight ratio energy density and method and application thereof
  • Micro-energy system with high weight ratio energy density and method and application thereof

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Embodiment Construction

[0027] The present invention is a manufacturing process of a high-weight specific energy density micro-energy system (such as figure 2 )as follows:

[0028] ① Clean the back surface of the GaAs solar cell, the cleaning condition is to use isopropanol, megasonic cleaning, room temperature, 3min;

[0029] ②Grow 150-350nm Al film by sputtering; the sputtering conditions are: the distance between the Al target (5N) and the substrate is 4.5cm, and the background pressure is 2×10 -4 Pa, the target should be sputtered for 30min before depositing the film, the sputtering power is 90W, the sputtering atmosphere is Ar, the flow rate is 30sccm, the working pressure is 1.2Pa, the deposition power is 110W, the substrate temperature is less than 90°C during deposition, The rate is 25nm / min, and the continuous deposition time can be adjusted to obtain an Al film with a thickness of about 150-350nm;

[0030] ③Co x Ni 1-x N thin film: Sputtering uses a metal nickel-cobalt alloy with a diam...

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Abstract

The invention relates to a micro-energy system with a high weight ratio energy density, a method and application. The invention is characterized that the construction of the system comprising the following steps of: (1) sputtering and growing an Al film on the back surface of a GaAs battery; (2) sputtering and depositing nitrogenized Ni-Co on the surface of Al film, wherein the general formula is ComNi1-mN, and m is more than 0 and less than 1; (3) sputtering and depositing a Li1.3Ti1.7Al0.3(PO4)3 film on the surface of the nitrogenized Ni-Co film; (4) depositing a metal Li film on the Li1.3Ti1.7Al0.3(PO4)3 film; (5) sputtering a layer of Cu film on the surface of the Li film; and (6) during sputtering of the steps (2)-(5), firmly attaching a stainless steel mask plate to the Al surface of an uncovered multi-layer film on the surface of the Al film, arranging an energy management circuit and an RF (Radio-Frequency) transceiving module in sequence, and connecting the anode of the GaAs battery, the anode of the Li battery, the output end of the energy management module and the output end of the RF transceiving module with a metal wire. According to the invention, the high weight ratio energy density can be up to 438wh / kg, the system can work for 5 days continuously on cloudy days, and a technical measure is provided for long-time power supply and field application of the node miniaturization of the Internet of things.

Description

technical field [0001] The present invention relates to a high weight specific energy density micro energy system, method and application thereof, in particular to a high weight specific energy density micro energy system, a preparation method and the application. It belongs to the field of microelectronic technology. Background technique [0002] The miniaturization, dissemination, and unattended sensor nodes of the Internet of Things are the future development trend. Special requirements are put forward for the volume, weight, power and working current of the energy source. There is an urgent need for small size, light weight, (weight , volume) high specific capacity of the micro-energy to match it, micro-energy and load monolithic integration will help to further improve the weight of the micro-system specific energy density. [0003] GaAs solar cells are currently the most efficient solar cells, AM1.5 (1000W / m 2 , under the condition of 25°C, IEC61646-the test standar...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01M10/46H01M10/058
CPCY02E60/10Y02P70/50
Inventor 周健孙晓玮谈惠祖周舟王伟周建华
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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