Permanent-suspension diamond grinding liquid

A technology of grinding fluid and diamond, applied in the field of grinding fluid, can solve the problems of cost increase, waste of manpower and material resources, high temperature and vacuum requirements, etc., and achieve the effect of ensuring stable use

Inactive Publication Date: 2014-03-26
上海百兰朵电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The usual components of the abrasive liquid are diamond differential, aviation gasoline, kerosene, transformer oil, various vegetable oils, animal oils and hydrocarbons, and mixed with a number of emulsifiers. This abrasive liquid can be suspended when used, so as to achieve The effect of suspending the abrasive, but for abrasives with larger particles, a more suspending abrasive is required. The above-mentioned abrasive is usually suspended during use, that is, it is shaken before use, and it is always in a stirring state during use, which wastes manpower and material resources. , and is not effective for large particle suspension
[0003] Such as the Chinese patent application number is 02138718.4, the name is "high suspension power water-soluble anti-rust grinding fluid", its preparation method has higher requirements on temperature and vacuum degree, which increases the cost

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] Grinding fluid formula selection:

[0030] Undecane 87%;

[0031] Disperse thixotropic agent (polyvinyl alcohol) 1%;

[0032] Surfactant (polyoxyethylene ethylphenol ether) 10%;

[0033] pH regulator (mixture of ethanolamine and triethanolamine) 1%;

[0034] Diamond differential 1%.

[0035] Preparation method: fully stir and fuse the alkane, dispersing thixotropic agent, and surfactant in the above ratio, add diamonds with a particle size of 1-10 μm into the above-mentioned fused solution, and use ultrasonic dispersion, and the ultrasonic dispersion uses 500 watts , the dispersion time is 10min, and after the end, adjust the pH to 7.8 with a mixture of ethanolamine and triethanolamine.

[0036] Use the above-mentioned prepared polishing solution to polish 2-inch 5 pieces of sapphire on a special polishing machine. The time is 10 minutes, and the surface roughness of the sapphire sheet becomes 0.008 μm after polishing. There are no obvious scratches on the polishe...

Embodiment 2

[0038] Grinding fluid formula selection:

[0039] Dodecane 85%;

[0040] Disperse thixotropic agent (nonylphenol polyoxygen) 3%;

[0041] Surfactant (propylene oxide) 10%;

[0042] pH regulator (hydrochloric acid) 2%;

[0043] Diamond differential 1%.

[0044] Preparation method: fully stir and fuse the alkane, dispersing thixotropic agent, and surfactant in the above ratio, add diamonds with a particle size of 1-10 μm into the above-mentioned fused solution, and use ultrasonic dispersion, and the ultrasonic dispersion uses 500 watts , the dispersion time is 15min, and after the end, adjust the pH to 6.8 with a mixture of ethanolamine and triethanolamine.

[0045] Use the above-mentioned prepared polishing solution to polish 2-inch 5 pieces of sapphire on a special polishing machine. The time is 10 minutes, and the surface roughness of the sapphire sheet becomes 0.009 μm after polishing. There are no obvious scratches on the polished surface, and the polishing rate is 2....

Embodiment 3

[0047] Grinding fluid formula selection:

[0048] Tridecane 82%;

[0049] Disperse thixotropic agent (vinyl ether and nonylphenol polyoxygen mixture) 5%;

[0050] Surfactant (propylene oxide) 10%;

[0051] pH adjuster (mixture of phosphoric acid and ethanolamine) 2%;

[0052] Diamond differential 1%.

[0053] Preparation method: fully stir and fuse the alkane, dispersing thixotropic agent, and surfactant in the above ratio, add diamonds with a particle size of 1-10 μm into the above-mentioned fused solution, and use ultrasonic dispersion, and the ultrasonic dispersion uses 500 watts , the dispersion time is 20min, and after the end, adjust the pH to 7.2 with a mixture of ethanolamine and triethanolamine.

[0054] Use the above-mentioned prepared polishing solution to polish 2-inch 5 pieces of sapphire on a special polishing machine. The time is 10 minutes, and the surface roughness of the sapphire sheet becomes 0.008 μm after polishing. There are no obvious scratches on ...

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Abstract

The invention discloses a permanent-suspension diamond grinding liquid, which is characterized in that the liquid is prepared by mixing the following components according to the ratios: 80-90% of alkanes, 1-5% of dispersion thixotropic agents, 10% of surfactants, 1-3% of pH adjusting agents, 0.1-1% of diamond micropowder; the preparation method comprises the following steps: fully stirring and mixing the alkanes, the dispersion thixotropic agents, and the surfactants according to the ratios, adding diamond micropowder into the dissolved solution, performing ultrasonic dispersion, and adjusting the pH to be neutral by the pH adjusting agent. The invention is applicable to the grinding and polishing of LED chips, LED display screens, optical crystals, silicon wafers, compound crystals, liquid crystal panels, jewels, ceramics, germanium wafers, metal workpieces and the like, can maintain a uniform suspension state for a long time, and does not generate any phenomenon of precipitation, stratification, or failure.

Description

technical field [0001] The invention relates to a grinding liquid, which belongs to the technical field of chemical mechanical polishing, in particular to a grinding liquid for permanently suspended diamonds. Background technique [0002] In the process of semiconductor processing, the initial semiconductor substrate needs to be polished, and the polishing process is usually carried out with abrasive liquid. The usual components of the abrasive liquid are diamond differential, aviation gasoline, kerosene, transformer oil, various vegetable oils, animal oils and hydrocarbons, and mixed with a number of emulsifiers. This abrasive liquid can be suspended when used, so as to achieve The effect of suspending the abrasive, but for abrasives with larger particles, a more suspending abrasive is required. The above-mentioned abrasive is usually suspended during use, that is, it is shaken before use, and it is always in a stirring state during use, which wastes manpower and material r...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C09G1/02
Inventor 朱孟奎
Owner 上海百兰朵电子科技有限公司
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