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Hybrid silicon vertical cavity laser with in-plane coupling

A laser and grating coupler technology, applied in the field of hybrid silicon/III-V vertical cavity laser structure, can solve problems such as time-consuming

Active Publication Date: 2011-08-03
INTEL CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Both methods are time consuming and require sensitive alignment techniques

Method used

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  • Hybrid silicon vertical cavity laser with in-plane coupling
  • Hybrid silicon vertical cavity laser with in-plane coupling
  • Hybrid silicon vertical cavity laser with in-plane coupling

Examples

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Embodiment Construction

[0014] What is described is a VCSEL-like laser on silicon. Advantages are gained by combining the high efficiency and modulation bandwidth of vertical cavity lasers with the light guidance, multiplexing, detection and modulation capabilities of in-plane silicon photonics.

[0015] Reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the invention. Thus, appearances of the phrase "in one embodiment" or "in an embodiment" in various places throughout the specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

[0016] now refer to figure 2 , an embodiment of the invention involves bonding a wafer of active III-V semiconductor material over a grating couple...

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Abstract

A silicon vertical cavity laser with in-plane coupling comprises wafer bonding an active III-V semiconductor material above a grating coupler made on a silicon-on-insulator (SOI) wafer. This bonding does not require any alignment, since all silicon processing can be done before bonding, and all III-V processing can be done after bonding. The grating coupler acts to couple the vertically emitted light from the hybrid vertical cavity into a silicon waveguide formed on an SOI wafer.

Description

technical field [0001] Embodiments of the present invention are directed to vertical cavity lasers, and more specifically, to hybrid silicon / III-V vertical cavity laser structures used in in-plane waveguide-based photonic integrated circuits. Background technique [0002] While silicon is an excellent material for guiding light and can detect and modulate light at high data rates, it still cannot efficiently generate large amounts of light. Silicon can be an inefficient light emitter due to a fundamental limitation known as the indirect bandgap. The indirect bandgap prevents the atoms in silicon from emitting a large number of photons when a charge is applied. Silicon instead tends to emit heat. [0003] One way to generate light on silicon materials is the so-called hybrid silicon evanescent platform. Indium phosphide, one of several specialized materials including gallium arsenide, emits energy as photons of light when a voltage is applied. Both materials are used to m...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S5/183H01S5/20H01S5/34H01S5/187
CPCH01S5/026H01S5/0268H01S5/105H01S5/183H01S5/0215H01S5/1032H01S5/1838H01S5/02248G02B6/4204G02B6/124H01S5/02325H01S5/11
Inventor B·R·科赫
Owner INTEL CORP
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