Method for coating film on solar high-temperature heat collection tube used for power generation and horizontal film coating machine

Abstract

The invention discloses a horizontal film coating machine for a solar high-temperature heat collection tube used for power generation. The horizontal film coating machine comprises a vacuum chamber 1, a target installment tube 2, a workpiece frame 3, a fixed fluted disc 4, a support wheel 5 and a rotary driving mechanism, wherein the vacuum chamber has a cylindrical and horizontal structure with a door at the upper part, the target installment tube 2 is installed on the left and right side plates 11 in the vacuum chamber 1 through left and right flanges 7 and provided with a planar magnetron sputtering target 22 or / and a rotary cylindrical magnetron sputtering target 23; the workpiece frame 3 consists of a turntable 31, a fluted disc 32, a connecting rod 33 and left and right telescopic autorotating shafts 34; a fixed gear 4 is fixed on the right side plate 11 of the vacuum chamber 1 through support columns 41; and the rotary driving mechanism comprises a power input shaft 8 and a driving gear 9 connected with the power input shaft 8, wherein the driving gear 9 is engaged with the turntable 31. By changing a vertical structure into a horizontal structure, the invention solves the problems on ultrahigh equipment, ultrahigh workshops, use and maintenance and the like caused by the film coating of an overlength tube. The horizontal film coating machine is convenient and reliable to operate, has no oil or gas pollution, and better ensures the quantity of a coated film.

Description

technical field [0001] The invention relates to a special equipment for vacuum coating, in particular to a coating method and a horizontal coating machine for solar high-temperature heat-collecting tubes for power generation. Background technique [0002] At present, the most common heat collector tube coating machines in the domestic market are all vertical structures. The length of the medium and low temperature heat collector tubes produced is mostly within 1.5-2.1 meters. The structure is double-layer single-ended opening, and water is used as the heat transfer medium. The temperature requirement is not high, and it is mainly used in solar water heaters and other hot water projects, which cannot meet the needs of high-temperature heat collecting tubes for solar power generation. The structure of the high-temperature vacuum heat collector tube for power generation is a double-layer double-ended opening. It is coated with a light-selective absorption coating on an alloy tu...

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Problems solved by technology

[0005] The technical solution for realizing the above-mentioned purpose of the present invention is: a method for coating a solar high-temperature heat collector tube for power generation, changing the coating vacuum chamber of a vertical structure into a coating vacuum chamber of a horizontal structure, and the vacuum chamber adopts a cylindrical horizontal top-opening door structure, In order to solve the problems of super high equipment, super high factory building and difficult maintenance caused by super long tube coating

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