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Method for making self-supporting structure of nano fluid system based on SU-8 photoresist

A self-supporting structure, SU-8 technology, used in nanotechnology, microstructure technology, microstructure devices, etc., can solve problems such as increasing process complexity and manufacturing cost, and nanoimprinting technology cannot process micro-nano composite structures at the same time. , to achieve the effect of low production cost, simple and controllable method, and cost reduction

Inactive Publication Date: 2011-04-13
HEFEI UNIV OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, nanofluidic systems include nanoscale channels and large sample cell structures. Nanoimprinting technology cannot process such micro-nano composite structures at the same time, and it is often necessary to combine conventional micron processing methods to fabricate such large sample cell structures. Size structure
This undoubtedly puts forward high requirements on the alignment process and precision, which increases the complexity of the process and the production cost

Method used

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  • Method for making self-supporting structure of nano fluid system based on SU-8 photoresist

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Embodiment Construction

[0025] The manufacturing method of the self-supporting structure of the nanofluid system based on SU-8 photoresist in this embodiment operates as follows:

[0026] 1. Make PDMS soft template:

[0027] Clean the holographic grating 1, see figure 1 A. Configure the PDMS viscous liquid. After stirring, the PDMS viscous liquid will form a lot of bubbles, and the bubbles will disappear slowly after standing for about 30 minutes. Cast the configured PDMS viscous liquid 2 on the holographic grating 1 and use heat Stage bake to cure PDMS 2, the bake temperature is 90℃, the time is 60 minutes, see figure 1 B. Finally, use tweezers to remove the cured PDMS seal 2. At this time, the PDMS 2 has copied the micro-nano structure of the holographic grating, see figure 1 C.

[0028] 2. Production of fluid channel substrate:

[0029] Firstly, the glass substrate 3 is cleaned and treated, the glass substrate 3 is ultrasonically treated with acetone for 5 minutes, then rinsed with deionized water and...

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Abstract

The invention discloses a method for making a self-supporting structure of a nano fluid system based on a SU-8 photoresist, which is characterized by comprising the following steps of: firstly processing and making a PDMS (Polydimethylsiloxane) flexible template, making a SU-8 nano channel substrate by utilizing the PDMS flexible template, simultaneously making a SU-8 bonding layer comprising a sample pond by utilizing ultraviolet exposure development, realizing the bonding sealing of the SU-8 nano channel substrate and the bonding layer by utilizing a bonding technique, and finally removing PDNS and PET (Polyethylene Terephthalate) flexible substrates to obtain the self-supporting structure of the nano fluid system. The method has the advantages of simple operation, low making cost and low equipment requirement. The making result shows that the system has no delamination and blockage, the bonded interface can be hardly seen, and the outline of a channel is clear and visible so that the self-supporting structure of the nano fluid system has good quality.

Description

Technical field [0001] The invention relates to a method for manufacturing a self-supporting structure of a nanofluid system, and more specifically to the use of a soft seal of polydimethylsiloxane (PDMS) and polydimethylsiloxane (PDMS) and polydimethylsiloxane (PDMS). Polythylene terephthalate (Polythylene terephthalate, abbreviated as PET, also including PETP) soft substrate is used as a sacrificial layer to be applied to the processing of nanofluid systems, which belongs to the technical field of manufacturing micro-nano fluid systems. Background technique [0002] Nanofluid system as a brand-new field has attracted the attention of many scientific researchers, because the nanofluidic channel included in it has a cross-section of hundreds to several nanometers in one dimension or more, and its size may be the same as the solute in the fluid or The molecules of the solvent itself are at the same magnitude, so the fluid transport in it has specific properties, which can change m...

Claims

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Application Information

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IPC IPC(8): G03F7/00B82Y40/00B81C1/00
Inventor 王旭迪李小军郑正龙李鑫金建田扬超付绍军
Owner HEFEI UNIV OF TECH
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