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Method for recovering hydrogen chloride from trichlorosilane tail gas

A technology of trichlorosilane and hydrogen chloride, which is applied in the direction of chlorine/hydrogen chloride, chlorine/hydrogen chloride purification, chemical instruments and methods, etc., can solve the problems of high recovery rate of hydrogen chloride and low operating cost, and achieve high recovery rate and low operating cost , the effect of high purity

Active Publication Date: 2011-04-13
江西宏柏新材料股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] The object of the present invention is to provide a method for recovering hydrogen chloride from the tail gas produced by trichlorosilane, which has simple process, low investment, low operating cost, high recovery rate of hydrogen chloride, high purity of recovered hydrogen chloride, and zero hydrogen chloride. emission, completely solved the problem of environmental pollution

Method used

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  • Method for recovering hydrogen chloride from trichlorosilane tail gas
  • Method for recovering hydrogen chloride from trichlorosilane tail gas
  • Method for recovering hydrogen chloride from trichlorosilane tail gas

Examples

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Embodiment 1

[0048] Such as figure 1 As shown, the tail gas produced by trichlorosilane enters the compressor 6, and after being pressurized to 0.6 MPa, it is passed into the recovery condenser 7, and is pressurized and condensed with a condenser at -30 ° C. In the tail gas of trichlorosilane SiHCl 3 、SiH 2 Cl 2 and SiCl 4 Be condensed into liquid and be recycled to trichlorosilane storage tank 16, non-condensable gas comprises HCl, H 2 and N 2 , its volume percentage is HCl accounts for 35%, H 2 60% and N 2 5%. The non-condensable gas coming out of the condenser 7 enters the heater 8 for heating, and the heating temperature is 45°C.

[0049] The pressure of the non-condensable gas coming out of the heater 8 is 0.6MPa, the temperature is 45°C, and it enters the bottom of the packed tower 1 and 2 from the inlet pipe 14 of the adsorption system, and the non-condensable tail gas enters the packed tower 1 and 2 from bottom to top , start to adsorb. The height and diameter ratio of th...

Embodiment 2

[0054] Such as figure 1 As shown, the tail gas produced by trichlorosilane enters the compressor 6, and after being pressurized to 0.6 MPa, it is passed into the recovery condenser 7, and is pressurized and condensed with a condenser at -30 ° C. In the tail gas of trichlorosilane SiHCl 3 、SiH 2 Cl 2 and SiCl 4 Be condensed into liquid and be recycled to trichlorosilane storage tank 16, non-condensable gas comprises HCl, H 2 and N 2 , its volume percentage is HCl accounts for 35%, H 2 60% and N 2 5%. The non-condensable gas coming out of the condenser 7 enters the heater 8 for heating, and the heating temperature is 60°C.

[0055]The pressure of the non-condensable gas coming out from the heater 8 is 0.6 MPa, and the temperature is 60°C. It enters the bottom of the packed towers 1 and 2 from the inlet pipe 14 of the adsorption system, and the non-condensable tail gas enters the packed towers 1 and 2 from bottom to top. , start to adsorb. The height and diameter ratio ...

Embodiment 3

[0060] Such as figure 1 As shown, the tail gas produced by trichlorosilane enters the compressor 6, and after being pressurized to 0.6 MPa, it is passed into the recovery condenser 7, and is pressurized and condensed with a condenser at -30 ° C. In the tail gas of trichlorosilane SiHCl 3 、SiH 2 Cl 2 and SiCl 4 Be condensed into liquid and be recycled to trichlorosilane storage tank 16, non-condensable gas comprises HCl, H2 and N 2 , its volume percentage is HCl accounts for 35%, H 2 60% and N 2 5%. The non-condensable gas coming out of the condenser 7 enters the heater 8 for heating, and the heating temperature is 50°C.

[0061] The pressure of the non-condensable gas coming out of the heater 8 is 0.6MPa, the temperature is 50°C, and it enters the bottom of the packed tower 1 and 2 from the inlet pipe 14 of the adsorption system, and the non-condensable tail gas enters the packed tower 1 and 2 from bottom to top , start to adsorb. The height and diameter ratio of the ...

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Abstract

The invention relates to separation of gases, in particular to a method for recovering hydrogen chloride from trichlorosilane tail gas. The method comprises the following steps that: the trichlorosilane tail gas enters a compressor, is compressed, and enters a recovery condenser; the trichlorosilane, dichlorosilane and silicon tetrachloride in the tail gas are condensed to a liquid state from a gaseous state, and are recovered; noncondensable gas in the tail gas is heated and enters an adsorption system; the hydrogen chloride is adsorbed by adsorbent in a packed tower, and is separated from the tail gas after impurity removal and desorption; and the separated hydrogen chloride is delivered to a trichlorosilane synthetic furnace to be recycled. The method has the advantages of small investment, lower operation cost, simplicity, high recovery rate of the hydrogen chloride in the trichlorosilane tail gas, and high purity of the recovered hydrogen chloride.

Description

Technical field: [0001] The invention relates to the separation of gases, in particular to a method for recovering hydrogen chloride from the tail gas of trichlorosilane production. Background technique: [0002] The basic reaction formula of trichlorosilane synthesis is H 2 +Cl 2 =2HCl, Si+3HCl=SiHCl 3 +H 2 , in the synthesis process of trichlorosilane, the conversion rate of hydrogen chloride is generally 80%, and about 20% of hydrogen chloride does not participate in the reaction. The main components of trichlorosilane synthesis tail gas are hydrogen chloride, trichlorosilane, silicon tetrachloride, hydrogen, and nitrogen. Exhaust gas contains a large amount of chloride, if not handled properly, it will definitely have a bad impact on the environment. Obviously, the synthesis furnace tail gas is a recyclable product or a recyclable raw material. Effective separation and recovery of tail gas can not only improve the utilization rate of raw materials, but also reduce ...

Claims

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Application Information

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IPC IPC(8): C01B7/07B01D53/04
Inventor 郎丰平邱顺恩黄少辉黄小明李明生
Owner 江西宏柏新材料股份有限公司
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