Method for manufacturing negative temperature coefficient (NTC) thermosensitive chip for high-precision temperature sensor
A technology of temperature sensor and manufacturing method, which is applied to thermometers, thermometers and instruments using electric/magnetic elements directly sensitive to heat, and can solve problems such as aging, electrical performance drift, and poor stability between semiconductor ceramics and metal electrodes
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Embodiment 1
[0050] This embodiment is illustrated by taking a disc-type NTC thermistor with a resistance value of 10Ω and a diameter of 9mm as an example: image 3 , Figure 4 As shown, the production steps are: (1) preparation of NTC heat-sensitive semiconductor ceramic powder; (2) strip molding / sintering; (3) glass packaging; (4) resistivity test; (5) size cutting; ( 6) Upper electrode.
[0051] specifically is:
[0052] 1. Preparation of NTC thermosensitive semiconductor ceramic powder 1 (preparation of NTC material with resistivity ρ=19.23Ω.cm)
[0053] Physical method (ball milling method) heat-sensitive semiconductor ceramic powder, its process is: batching (according to a specific formula) - ball milling - discharge - drying - sieving - pre-calcination - grinding - drying - sieving - powder for later use.
[0054] 2. Strip molding / sintering: the prepared NTC heat-sensitive ceramic powder 1 is placed in a mixing tank according to the weight ratio of porcelain powder: PVA binder = ...
Embodiment 2
[0066] This embodiment is illustrated by taking the manufacturing method of 0603~10KΩB(25 / 50)=3435K chip NTC thermistor as an example: it is basically the same as Embodiment 1, except that:
[0067] (1) The preparation method of the NTC thermosensitive semiconductor ceramic powder is made by the chemical method of sol-gel, and the specific steps are: preparation of sol-gelling-gel drying-calcination-NTC thermosensitive semiconductor Ceramic powder is available for use.
[0068] (2) Strip forming / sintering:
[0069] NTC thermosensitive ceramic rod (rod) isostatic pressing method:
[0070] Put the prepared NTC heat-sensitive ceramic powder in the rubber mold, loosely pack and vibrate;
[0071] Place it in an isostatic press, press with a pressure of 300-400Mpa for 30 minutes, release the pressure, and take it out from the mold;
[0072] High-temperature sintering: The pressed green ceramic ingot is slowly heated (1°C / min) to 1200±50°C in a high-temperature sintering furnace, ...
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