Terahertz wave band vanadium oxide optical switch and preparation method thereof

Abstract

The invention discloses a terahertz (THz) wave band vanadium oxide optical switch and a preparation method thereof and relates to the technical field of optical communication. The vanadium oxide optical switch is formed by the vanadium oxide film and is loaded in a THz time-domain spectrum system or modem. The method comprises the following steps: using the reactive magnetic sputtering method to prepare a vanadium oxide film on the silicon substrate material; using the THz time-domain spectrum system to generate THz wave, performing laser exciation to the vanadium oxide film during the transmission of the THz wave to ensure that the THz wave can not penetrate through the vanadium oxide film and turn off the vanadium oxide optical switch; and using the THz time-domain spectrum system to generate THz wave, removing laser during the transmission of the THz wave to ensure that the THz wave penetrates through the vanadium oxide film and turn on the vanadium oxide optical switch. By adopting the optical switch and preparation method thereof provided by the invention, the effects of fast switching speed, low insertion loss and high extinction ratio can be realized.

Description

technical field [0001] The invention relates to the technical field of optical communication, in particular to a THz band vanadium oxide optical switch and a manufacturing method thereof. Background technique [0002] The all-optical network technology that is developing in recent years puts forward higher requirements for new optical switching devices: fast switching speed, small insertion loss, large extinction ratio, long life, miniaturized structure, easy integration, low power consumption and low price. At present, the widely used optical switch devices mainly include the following two types: one is a mechanical optical switch, such as a micro-mechanical optical switch, which is made by MEMS (Micro Electro Mechanical Systems) The advantages of small loss and high integration, but there are disadvantages such as slow switching speed due to the operation mode of physical displacement; the other type is non-mechanical waveguide optical switch, which uses the physical effec...

AI Technical Summary

Problems solved by technology

At present, the widely used optical switch devices mainly include the following two types: one is a mechanical optical switch, such as a micro-mechanical optical switch, which is made by MEMS (Micro Electro Mechanical Systems) The advantages of small loss and high integration, but there are disadvantages such as slow switching speed due to the operation mode of physical displacement; the other type is non-mechanical waveguide optical switch, which uses the physical effects of solid materials (such as electro-optic, thermo-optic, magneto-optical and Acousto-optic effect) to achieve optical path conversion, but non-mechanical waveguide optical switches have the disadvantage of large insertion loss

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