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Tungsten-titanium co-doped diamond coating material and preparation technique thereof

A diamond coating and coating material technology, applied in metal material coating process, coating, ion implantation plating and other directions, to achieve the effect of low wear rate and low friction coefficient

Inactive Publication Date: 2010-07-28
CHINA UNIV OF GEOSCIENCES (BEIJING)
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  • Summary
  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

[0003] In order to overcome the shortcomings of single element doping in the current DLC coating, the patent of the present invention proposes a tungsten-titanium co-doped DLC coating material and its preparation technology, which is characterized in that: the synthesized doped DLC coating contains carbon, tungsten and Titanium and other elements are prepared by magnetron sputtering + glow discharge plasma enhanced chemical vapor deposition method, which includes the following steps in sequence:

Method used

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Embodiment approach

[0017] The patent of the present invention will be described in further detail below in conjunction with specific examples, but not as a limitation to the patent of the present invention.

[0018] First, use ultrasonic cleaning to remove the contamination layer on the surface of the workpiece; then use argon ions generated by glow discharge to perform ion etching and cleaning on the surface of the workpiece. During etching, the argon pressure in the vacuum chamber is 2Pa, and the voltage between the workpiece and the vacuum chamber is 600- 1000V. Then use reactive magnetron sputtering deposition technology to prepare Ti / TiN / TiCN / TiC gradient transition layer. The magnetron sputtering target is made of high-purity titanium, the target voltage is 400V, the target current is 15-20A; the negative bias of the workpiece is 100 -300V; In the process of preparing the transition layer, argon, argon / nitrogen mixed gas, argon / nitrogen / methane mixed gas, argon / methane mixed gas are introd...

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Abstract

The invention discloses a tungsten-titanium co-doped diamond (DLC) coating material and a preparation technique thereof, which are characterized by: firstly, removing a pollution layer on the surface of a workpiece by ultrasonic cleaning, and performing argon-ion etching cleaning on the surface of the workpiece by glow discharge to obtain an atomic-scale clean surface; secondly, preparing a gradient transition layer by a reactive magnetron sputtering sedimentation method; and finally, preparing a preparing a DLC coating on the transition layer by magnetron sputtering and glow discharge plasma chemical vapor deposition method, wherein the synthesized DLC coating contains carbon element, tungsten element, titanium element and the like; the tungsten content is 2 to 5 percent; and the titanium content is 0.1 to 2.0 percent. The tungsten-titanium co-doped diamond (DLC) coating material is excellent in membrane / base binding force and low in friction coefficient and wear rate.

Description

Technical field: [0001] The patent of the invention relates to a tungsten-titanium co-doped diamond-like carbon (DLC) coating material and its preparation technology, which belongs to the surface modification technology of special mechanical parts. Background technique: [0002] DLC coating has the advantages of high hardness, high elastic modulus, excellent friction and wear performance and good chemical stability, etc., and has a very broad application prospect in the field of surface modification of mechanical key friction pairs. In order to solve the problems of high internal stress, poor film / substrate bonding force, poor thermal stability, and high brittleness of pure DLC coatings, people have developed a variety of methods to improve the performance of DLC coatings by doping, such as doping DLC ​​coatings W, Ti, Cr, Zr, Cu, Si, F and other elements are mixed to form a multi-component multi-phase structure based on an amorphous carbon film. At present, doped DLC coati...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/27C23C14/35C23C16/513C23C16/02
Inventor 付志强王成彪岳文彭志坚于翔
Owner CHINA UNIV OF GEOSCIENCES (BEIJING)
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