Continuous winding magnetic control sputtering vacuum coating device
A magnetron sputtering and vacuum coating technology, applied in the field of continuous coating equipment and special production equipment, can solve very effective technical solutions, problems such as not being obtained, and achieve the effect of increasing adaptability and preventing gas channeling
Inactive Publication Date: 2012-12-12
SHENZHEN PROSUNPRO SOLAR ENERGY
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Problems solved by technology
The above-mentioned problems have existed in this industry for a long time, and a very effective technical solution has not been obtained so far
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Abstract
The invention belongs to continuous coating device for solar selective absorption coating in plate-type solar apparatus, in particular relates to a continuous winding magnetic control sputtering vacuum coating device. The continuous winding magnetic control sputtering vacuum coating device comprises an unwinding chamber, a winding chamber, tension controlling chambers, a pre-processing chamber and craft chambers; the unwinding chamber and the winding chamber are respectively arranged at the head and tail ends of the device and respectively connected with a tension controlling chamber; the tension controlling chamber at one end of the unwinding chamber is connected with the pre-processing chamber; at least one craft chamber is arranged between the pre-processing chamber and the tension controlling chamber at one end of the winding chamber; one end of unwinding chamber, one end of winding chamber, two ends of tension controlling chambers, two ends of pre-processing chamber, and two endsof craft chambers are provided with flange plates of the same dimension, the unwinding chamber, the winding chamber, the tension controlling chambers, the pre-processing chamber and the craft chambers are connected into an integral by the flange plates. The invention provides a special coating device for long-term continuous solar selective absorption coating, and the device has the advantages ofhigh production efficiency, stable quality and outstanding film performance.
Description
Technical field [0001] The invention belongs to continuous coating equipment for solar energy selective absorption coatings in panel solar energy, and belongs to the field of solar thermal utilization, in particular to special production equipment that can continuously and uninterruptedly plate selective coating coatings on metal strips. Background technology [0005] Solar water heaters are energy-saving devices that absorb the sun's radiant heat and heat cold water for people to use in their lives and production. It is the most mature and advanced product in my country's solar thermal utilization. Provide the people with new water heater products that are environmentally friendly, safe, energy-saving and hygienic. The solar water heaters I used in the past few years were mainly vacuum tube solar water heaters, but vacuum tube solar water heaters are only used in small independent solar water heaters. With the continuous improvement of solar energy utilization, some l...
Claims
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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/56C23C14/54
Inventor 丘仁政陈汉文罗宾
Owner SHENZHEN PROSUNPRO SOLAR ENERGY
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