Method for rolling grinding of ground surface of single crystal silicon
A single crystal silicon and grinding technology, applied in grinding/polishing equipment, machine tools suitable for grinding workpiece planes, machine tools suitable for grinding workpiece edges, etc. To solve problems such as heavy quality, to simplify the grinding process, improve quality, and improve work efficiency
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[0037] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied in different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.
[0038] Please refer to Figures 2a to 2i and Figures 3a to Figure 3b , which is shown as a schematic diagram of an embodiment of the method for grinding surface spheroidal grinding of single crystal silicon according to the present invention. In the drawings, only the components related to the invented method of surface grinding and spherical grinding of single crystal silicon are shown instead of the number, shape and size of components in actu...
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