Method for preparing ultra-hydrophilic transparent titanium dioxide nano film
A titanium dioxide and nano-film technology, which is applied in the field of preparation of super-hydrophilic transparent titanium dioxide nano-films, can solve the problems of gray color, difficult to obtain a film with good crystal phase, etc., and achieves good bonding and strength, high density, good The effect of mechanical endurance
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[0017] Example 1: After the sample was ultrasonically cleaned with acetone, absolute ethanol, and double distilled water for 10 minutes, it was placed in a vacuum reaction chamber, and the background vacuum was pumped to 4.6×10 -3 Pa, Ar gas (99.99%) was passed into the vacuum chamber, the gas flow rate was 370 sccm, and the chamber pressure was ~2.5 Pa. Turn on the heating to make the chamber temperature reach 320°C, turn on the bias power supply, and adjust the voltage value to 300V. Generate plasma to clean the sample surface for 20 min. Then slowly reduce the bias voltage and turn off the bias voltage. Reduce the Ar flow rate to 66 sccm, turn on the sputtering power supply, the sputtering current value is 12A, and the bias voltage is 200V. After 2min, O 2 , the flow rate is 20sccm, and the sputtering pressure is 4.3×10 -1 Pa. Coating time 3.0 hours. After shutdown, the sample was taken out, and kept in a muffle furnace at 360°C for 10 hours.
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