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Ceramic part for magnetron, magnetron employing the same, and process for producing ceramic part for magnetron

A manufacturing method and ceramic technology, applied in the manufacture of discharge tubes/lamps, magnetrons, shells/containers of time-of-flight electron tubes, etc., can solve the problem that the yield rate has not been sufficiently improved, and the yield rate has not been fully obtained. Improvement, complexity and other problems, to achieve the effect of improving yield, improving reliability, and improving joint strength

Active Publication Date: 2010-02-17
KK TOSHIBA +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, since the metallization process for forming the Mo-Mn-based metallization layer is complicated compared with the case of forming the Mo metallization layer, the yield has not been sufficiently improved.
In addition, in order to improve the bondability between the Mo-Mn-based metallized layer and the gasket, it is necessary to perform Ni plating on the Mo-Mn-based metallized layer, but the yield of the plating has not been sufficiently improved.

Method used

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  • Ceramic part for magnetron, magnetron employing the same, and process for producing ceramic part for magnetron
  • Ceramic part for magnetron, magnetron employing the same, and process for producing ceramic part for magnetron
  • Ceramic part for magnetron, magnetron employing the same, and process for producing ceramic part for magnetron

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preparation example Construction

[0052] The preparation of the Mo-Mn paste is preferably carried out as follows: the Mo powder with an average particle diameter of 0.5 to 10 μm and the Mn powder with an average particle diameter of 0.5 to 10 μm are respectively pulverized for more than 40 hours, and then mixed with Adhesives are mixed. The ratio of Mo and Mn in the Mo—Mn-based paste is 4 to 12 mass %, preferably 6 to 8 mass %, when the total of Mo and Mn is 100 mass %. A series of steps for adjusting the Mo—Mn-based paste is preferably performed under an inert atmosphere such as nitrogen gas. In particular, since Mn is an active metal, it is preferable to perform the treatment in an inert atmosphere.

[0053] Generally, when forming a Mo—Mn metallization layer, voids are easily formed in the metallization layer. The voids are mainly gaps formed when the organic binder is burned, and if the particle diameters of the Mo powder and the Mn powder are large, the gaps are likely to become large. Therefore, in or...

Embodiment 1、 comparative example 1～3

[0096] [Example 1, Comparative Examples 1 to 3, Reference Example 1]

[0097] Example 1, Comparative Examples 1 to 3, and Reference Example 1 manufactured a rod-shaped article for a magnetron by the following steps.

[0098] Example 1: Process A1 → Process B1 → Process C1 → Process D1 → Process E1 → Process F1

reference example 1

[0102] Reference example 1: Process A1→Process B1→Process C1→Process D1→Process E1→Process F2

[0103] Each process is as follows.

[0104] Step A1: Use the following alumina sintered body in which Mn oxide (MnO 2 ), silicon oxide and magnesium oxide as sintering aids for firing. The Mn content in the alumina sintered body was 3.0 wt % in terms of Mn as a simple substance, 1.9 wt % in terms of Si as a simple substance, and 2.4 wt % in terms of Mg as a simple substance. In addition, when the composition of the grain boundary phase in the alumina sintered body was analyzed by X-ray diffraction method, no crystal peak was detected, and it was found to be a glass phase.

[0105] Step A2: Prepare the same alumina sintered body as in Step A1 except that Mn is not contained.

[0106] Step B1: Mo powder with an average particle diameter of 2 μm and Mn powder with an average particle diameter of 2 μm were pulverized for 75 hours using a ball mill. After the Mo powder and the Mn pow...

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Abstract

A ceramic part for magnetrons which has a metallic layer having improved adhesion strength. The ceramic part for magnetrons comprises a ceramic main body part (1) comprising an alumina sinter and Mo-Mn metallic layers (9 and 10) disposed by metallization on the surface of part of the ceramic main body part, wherein the ceramic main body part is an alumina sinter having an Mn-containing grain boundary phase and has an Mn-rich phase at the interface between the ceramic main body part and the Mo-Mn metallic layers.

Description

technical field [0001] The present invention relates to a ceramic component for a magnetron such as a stem for a magnetron that can be used in microwave heating equipment such as a microwave oven, a magnetron using the same, and a manufacturing method thereof. Background technique [0002] Heretofore, as rods for cathode supports of magnetrons, there are known figure 1 The shaft shown in (Japanese Patent Publication No. 4-75618 (Patent Document 1)). In the figure, reference numeral 1 is a shaft main body made of ceramics, and a through-hole 2 penetrating between both end surfaces is formed in the shaft main body 1 . A gasket joint surface 3 is formed on both side surfaces of the shaft main body 1 , and one side surface has a step around the gasket joint surface 3 to form an envelope joint surface 4 . In the through hole 2 of the main body part 1 of the rod-shaped object, lead wires 5, 6 are inserted as cathode support rods, and these lead wires 5, 6 and gaskets 7, 7 are bo...

Claims

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Application Information

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IPC IPC(8): H01J23/14C04B41/88H01J9/30
CPCH01J23/12H01J25/50C04B41/88C04B41/5138C04B41/009
Inventor 今泉辰弥星野政则佐藤英树
Owner KK TOSHIBA
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