High-speed multi-beam parallel laser direct-writing device

Abstract

The invention provides a high-speed multi-beam parallel laser direct-writing device applying to micro-nano processing. The device consists of an inscribing light source modulation module, an inscribing optical header, an out-of-focus detection module, an illuminating and monitoring module, a sample displacement table and a master control module. The device greatly improves inscribing speed by multi-beam laser parallel high-speed inscribing. A multi-beam inscribing sub-system can be combined with sample tables with different motion modes to form inscribing devices with different functions according to the requirement of actual application.

Description

technical field [0001] The invention relates to the field of micro-nano processing, in particular to a high-speed multi-beam parallel laser direct writing device, which can be applied to the production of micro-electromechanical systems (referred to as MEMS) devices, semiconductor chip maskless lithography, semiconductor mask production, binary optics device manufacturing and many other fields. Background technique [0002] In the 21st century, nanotechnology will become one of the driving forces to promote the economic development of all countries in the world, and will bring revolutionary changes to industries such as medicine, manufacturing, materials and information communication. As one of many micro-nano processing methods, laser direct writing technology has many advantages such as low cost, short processing cycle, flexible use, and low environmental requirements. In microelectronics, integrated optics (DOEs), micro-electromechanical systems (MEMs), It has been widel...

AI Technical Summary

Problems solved by technology

[0004] 1. Using a single beam to write samples point by point, the writing speed is too slow, and it takes too long to write large-scale samples

[0005] 2. Without a microscopic monitoring module, it is impossible to observe the surface of the sample

[0006] 3. The sample to be written is perpendicular to the horizontal plane, which is greatly affected by gravity, and it is impossible to clamp a large range of samples

[0007] 4. With a non-real-time computer as the core controller, the control speed is slow and high-speed writing cannot be achieved

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