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Aluminum member or aluminum alloy member with excellent corrosion resistance

A technology of aluminum alloy components and components, which is applied in the direction of electrical components, semiconductor/solid-state device manufacturing, anodic oxidation, etc., can solve the problems of insufficient improvement effects, etc., and achieve excellent adhesion, excellent gas corrosion resistance, and plasma resistance excellent effect

Inactive Publication Date: 2008-10-15
KOBE STEEL LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the effect of improving adhesion is still insufficient, and further gas corrosion resistance and plasma resistance are required.

Method used

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  • Aluminum member or aluminum alloy member with excellent corrosion resistance
  • Aluminum member or aluminum alloy member with excellent corrosion resistance

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0049] Taking JIS 6061Al alloy sheet or 5052Al alloy sheet (50~100mm×50~100mm) as the object, the final electrolysis voltage: 30~100V, treatment time: 20~200 minutes to anodize it, and then implement water treatment ( sealing treatment) to form various anodic oxide films (film thickness: 25 to 80 μm) on the surface of the Al alloy plate. The impedance of these membranes was measured (10 -2 the value of Z at Hz). from 10 -3 Hz to 10 5 Hz to measure its impedance, selected at 10 -2 The value at the Hz time is used as an index of the stability of the film. In addition, the hardness of the same film was measured with a micro Vickers hardness tester.

[0050] Next, as a test for confirming plasma resistance, plasma gas (gas: BCl 3 / 50%+Cl 2 / 50%sccm, ICP: 800-1000W, bias voltage: 30-120W, gas pressure: 2mT, temperature: 30-80°C), etch the film, and investigate the etching rate at this time. In addition, as a test of corrosion resistance, these aluminum alloy plates were imm...

Embodiment 2

[0058] Taking JIS 6061Al alloy sheet or 5052Al alloy sheet (50~100mm×50~100mm) as the object, the final electrolysis voltage: 30~60V, treatment time: 60~200 minutes for anodic oxidation treatment, and then implement water treatment ( sealing treatment) to form various anodic oxide films (film thickness: 10 to 60 μm) on the surface of the Al alloy plate. The impedance of these membranes was measured (10 -2 the value of Z at Hz). from 10 -3 Hz to 10 5 Hz to measure its impedance, selected at 10 -2 The value at the Hz time is used as an index of the stability of the film. In addition, the hardness of the same film was measured with a micro Vickers hardness tester.

[0059] In addition, the aluminum alloy plate was immersed in HCl (7% aqueous solution), and measured until H 2 Foaming time. Then use the DC power supply to measure the insulation breakdown voltage.

[0060] Table 3 shows the details of the formation and treatment conditions of each anode coating, and Table 4 ...

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Abstract

An aluminum member or aluminum alloy member which has, formed thereon, an anodized coating excellent not only in gas corrosion resistance and plasma resistance but in adhesion; and a member for vacuum apparatus which comprises the aluminum member or aluminum alloy member having such excellent corrosion resistance. Also provided is the member having sufficient withstand voltage characteristics which is useful in stably maintaining a plasma state in a process utilizing a plasma. The member is (1) an aluminum member or aluminum alloy member in which the anodized coating has an impedance as determined at a frequency of 10<-2> Hz of 10<7> O or higher and has a hardness of 400 or higher in terms of Vickers hardness (Hv) or (2) an aluminum member or aluminum alloy member in which the anodized coating has an impedance as determined at a frequency of 10<-2> Hz of 10<8> O or higher and has a hardness of 350 or higher in terms of Vickers hardness (Hv).

Description

technical field [0001] The present invention relates to an aluminum member or an aluminum alloy member having excellent gas corrosion resistance and plasma resistance, and particularly relates to devices suitable for manufacturing electronic products and machines such as semiconductors and liquid crystals, etc., using gases containing corrosive components and elements An aluminum member or an aluminum alloy member as a device material for plasma and plasma, and a vacuum container (vacuum chamber), a reaction container (reaction chamber), or a member provided in the container. Background technique [0002] Cl, F, Br Such as corrosive gases containing halogen elements, so it is required to have corrosion resistance to corrosive gases (hereinafter referred to as gas corrosion resistance). Moreover, in the above-mentioned chamber, besides the above-mentioned corrosive gas, halogen-based plasma is often generated, so the corrosion resistance to plasma (hereinafter referred to as...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C25D11/04H01L21/205C25D11/08
Inventor 久本淳和田浩司坪田隆之伊藤弘高
Owner KOBE STEEL LTD
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