Radio frequency micro electromechanical system switch of bistable monocrystaline silicon beam
A micro-electromechanical system, bistable technology, applied in the field of radio frequency MEMS, to achieve the effects of steady-state power consumption, maintaining power consumption, and reducing power consumption
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[0047] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0048] This bistable single crystal silicon beam RF MEMS switch provided by the present invention is based on figure 1 , figure 2 with image 3 The traditional nickel-iron single-arm beam electromagnetically driven switch shown is based on the realization principle, but the innovative structure adopted solves the problems of the traditional nickel-iron single-arm beam due to internal stress bending deformation, insufficient restoring force of the single-arm beam and short service life of the switch , while reducing power consumption.
[0049] Such as Figure 4 as shown, Figure 4 Schematic diagram of the structure of the bistable single crystal silicon beam RF MEMS switch provided by the present invention, the RF MEM...
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