High flux test chip of single cell traveling wave dielectric spectrum and test method
A test method and technology of dielectric spectrum, which is applied in the high-throughput test chip and test field of single-cell traveling wave dielectric spectrum, can solve the problems of inability to realize large-scale parallel testing, small number of test samples, and small moving range of optical tweezers, etc. problems, to achieve the effect of compact structure, easy integration, and fewer chip pins
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[0023] The embodiment of the high-throughput test chip of single-cell traveling wave dielectric spectrum provided by the present invention is as follows: figure 1 and figure 2As shown, it includes a microelectrode group 10 , a chip substrate 01 , a conductive layer 02 , an insulating layer 03 with via holes, a chip middle spacer layer 04 , a chip cover sheet 05 and an injection port 06 . The microelectrode group 10 is divided into three layers: an intrinsic photoconductive layer 11 , an n+ type photoconductive layer 12 and a transparent conductive film layer 13 . The material of the intrinsic photoconductive layer 11 can be selected from intrinsic state hydrogenated amorphous silicon; the material of the n+ type photoconductive layer 12 can be selected from n+ type hydrogenated amorphous silicon; the material of the transparent conductive film layer 13 can be selected from indium tin oxide transparent film material ; The width of the electrode should generally be more than 1...
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