Quanta amplified p type quanta trap infrared detector
An infrared detector and quantum well technology, applied in semiconductor devices, electrical components, circuits, etc., can solve the problems of low quantum efficiency and detection rate of devices, large effective mass of holes, low mobility, etc., and achieve high quantum efficiency and Responsiveness, process compatibility, high responsivity effect
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[0019] Below in conjunction with accompanying drawing and embodiment the specific embodiment of the present invention is described in further detail:
[0020] The p-type quantum well infrared detector structure of the quantum amplification of the present embodiment is as follows figure 1 shown. On the semi-insulating GaAs substrate 1, a 100-300nm GaAs buffer layer 2, an AlAs corrosion barrier layer 3, and n + GaAs lower electrode 4, first GaAs spacer layer 5, GaAs / AlGaAs double barrier layer 6, second GaAs spacer layer 7, InAs quantum dots 8, intrinsic GaAs quantum dot covering layers 9, 1 covering the InAs quantum dots -10 cycles of In y Ga 1-y As / GaAs quantum well active layer 10, third GaAs spacer layer 11, n + GaAs upper electrode layer 12 .
[0021] The thickness of the AlAs corrosion barrier layer 3 is determined by the process, generally below 20nm, preferably 10nm.
[0022] Gradient n + The thickness and doping concentration of the GaAs lower electrode layer 4 a...
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