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Method for preparing multi-arc ion plating aluminium titanium chrome silicon yttrium nitride multi-component ultra-hard reaction film

A multi-arc ion plating, multi-component technology, applied in the preparation of multi-arc ion plating multi-component superhard reaction film, the preparation of titanium aluminum chromium silicon yttrium nitride superhard reaction film, can solve the uneven distribution of components , unstable quality, poor adhesion, etc., to avoid excessive heating, uniform distribution of ingredients, and ensure the effect of ingredients

Inactive Publication Date: 2008-07-30
SHENYANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] In summary, the existing (TiAlCrSiY)N multi-component superhard reaction film preparation technology has the following defects: the combination of single-element metal targets is difficult to control, resulting in uneven distribution of components and unstable quality; poor adhesion Poor; membrane hardness is low and unstable

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] Embodiment 1: on W18Cr4V high-speed steel adopt multi-arc ion plating technology to prepare titanium aluminum chromium silicon yttrium nitride multicomponent superhard reaction film, its preparation method is:

[0022] 1. Determination of deposition technology and design of target material composition: determine multi-arc ion plating as the preparation technology of (TiAlCrSiY)N superhard film, and use Ti-Al-Cr-Si-Y multi-component alloy as the cathode target material. The composition of the alloy is: 23.1% by mass of Al, 10% by mass of Cr, 0.15% by mass of Si, 0.2% by mass of Y, and 66.55% by mass of Ti.

[0023] 2. Preparation of alloy target: three times of vacuum melting with high-purity sponge titanium (99.99%), high-purity aluminum (99.99%) and high-purity chromium (99.99%) to obtain an alloy ingot whose composition is Ti-23.1Al-10Cr -0.15Si-0.2Y (wt%), and then processed into a cathode target according to the target size required by the multi-arc ion plating equi...

Embodiment 2

[0031] Embodiment 2: on W18Cr4V high-speed steel adopt multi-arc ion plating technology to prepare titanium aluminum chromium silicon yttrium nitride multicomponent superhard reaction film, its preparation method is:

[0032] 1. Determination of deposition technology and design of target material composition: determine multi-arc ion plating as the preparation technology of (TiAlCrSiY)N superhard film, and use Ti-Al-Cr-Si-Y multi-component alloy as the cathode target material. The composition of the alloy is: 31.4% by mass of Al, 6.7% by mass of Cr, 0.25% by mass of Si, 0.1% by mass of Y, and 61.55% by mass of Ti.

[0033] 2. Preparation of alloy target: use high-purity sponge titanium (99.99%), high-purity aluminum (99.99%) and high-purity chromium (99.99%) for three times of vacuum melting to obtain an alloy ingot whose composition is Ti-31.4Al-6.7 Cr-0.25Si-0.1Y (wt%) is then processed into a cathode target according to the target size required by the multi-arc ion plating e...

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Abstract

The invention relates to a method of preparing a multi-component super-hard reaction film for a multiple-arc ion-plated nitride of titanium, aluminum, chrome, silicon and yttrium. The method includes the following steps in sequence: the confirmation of the deposition technique and the design of the components of the target material (1); the preparation of a alloy target (2); the selection and pre-processing of a workpiece sample (3); the confirmation of the quantity of the electric arc source (4); the confirmation of the deposition technique (5); the acquirement of a transition layer (6); the processing of vacuum heating (7) and the rotation of the workpiece sample. The method confirms the variation range of the components of the Ti, Al, Cr, Si, Y elements in the complex Ti-Al-Cr-Si-Y alloy target and causes the super-hard reaction film of the (TiAlCrSiY)N to have the advantages of strong adhesive power (larger than or equal to 180 N) and high hardness (larger than or equal to HV3200).

Description

technical field [0001] The present invention relates to a method for preparing a multi-component superhard reaction film, especially a method for preparing a multi-component superhard reaction film by multi-arc ion plating, such as a method for preparing a titanium aluminum chromium silicon yttrium nitride superhard reaction film. For the convenience of description, (TiAlCrSiY)N is used hereinafter to describe titanium aluminum chromium silicon yttrium nitride. Background technique [0002] Multi-arc ion plating is a vacuum physical deposition technology with multiple cathode arc evaporation sources that can be evaporated simultaneously. It has the remarkable characteristics of fast deposition speed, dense film structure, strong adhesion, and good uniformity. This technology is suitable for the preparation of superhard films, and has been successfully applied in the preparation of TiN, (Ti, Al)N superhard films. (Ti, Al) N, (Ti, Cr) N, (Ti, Zr) N and other superhard composi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/30C23C14/14C23C14/54
CPCC23C14/0641C23C30/005
Inventor 张钧王闯郭文英李丽彭娜
Owner SHENYANG UNIV
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