Method for preparing multi-arc ion plating aluminium titanium chrome silicon yttrium nitride multi-component ultra-hard reaction film
A multi-arc ion plating, multi-component technology, applied in the preparation of multi-arc ion plating multi-component superhard reaction film, the preparation of titanium aluminum chromium silicon yttrium nitride superhard reaction film, can solve the uneven distribution of components , unstable quality, poor adhesion, etc., to avoid excessive heating, uniform distribution of ingredients, and ensure the effect of ingredients
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Embodiment 1
[0021] Embodiment 1: on W18Cr4V high-speed steel adopt multi-arc ion plating technology to prepare titanium aluminum chromium silicon yttrium nitride multicomponent superhard reaction film, its preparation method is:
[0022] 1. Determination of deposition technology and design of target material composition: determine multi-arc ion plating as the preparation technology of (TiAlCrSiY)N superhard film, and use Ti-Al-Cr-Si-Y multi-component alloy as the cathode target material. The composition of the alloy is: 23.1% by mass of Al, 10% by mass of Cr, 0.15% by mass of Si, 0.2% by mass of Y, and 66.55% by mass of Ti.
[0023] 2. Preparation of alloy target: three times of vacuum melting with high-purity sponge titanium (99.99%), high-purity aluminum (99.99%) and high-purity chromium (99.99%) to obtain an alloy ingot whose composition is Ti-23.1Al-10Cr -0.15Si-0.2Y (wt%), and then processed into a cathode target according to the target size required by the multi-arc ion plating equi...
Embodiment 2
[0031] Embodiment 2: on W18Cr4V high-speed steel adopt multi-arc ion plating technology to prepare titanium aluminum chromium silicon yttrium nitride multicomponent superhard reaction film, its preparation method is:
[0032] 1. Determination of deposition technology and design of target material composition: determine multi-arc ion plating as the preparation technology of (TiAlCrSiY)N superhard film, and use Ti-Al-Cr-Si-Y multi-component alloy as the cathode target material. The composition of the alloy is: 31.4% by mass of Al, 6.7% by mass of Cr, 0.25% by mass of Si, 0.1% by mass of Y, and 61.55% by mass of Ti.
[0033] 2. Preparation of alloy target: use high-purity sponge titanium (99.99%), high-purity aluminum (99.99%) and high-purity chromium (99.99%) for three times of vacuum melting to obtain an alloy ingot whose composition is Ti-31.4Al-6.7 Cr-0.25Si-0.1Y (wt%) is then processed into a cathode target according to the target size required by the multi-arc ion plating e...
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