Three-dimensional microcosmic appearance inclined scanning method and apparatus
A technology of micro-morphology and oblique scanning, which is applied in the field of 3D scanning, can solve the problems of low efficiency, time-wasting, inability to move laterally, etc., and achieve the effect of improving scanning speed and efficiency and reducing scanning time
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[0021] The present invention adopts the oblique scanning method of three-dimensional microscopic topography, that is, the objective lens of the microscope is moved along the oblique loading platform, and the spatial displacement of the loading platform is controlled, and the displacement signal is transmitted to the computer through a displacement recorder (such as a photoelectric encoder) Among them, the coordinates P, L, and H of the loading platform are obtained, and P, L, and H are respectively the X, Y, and Z coordinates of the origin O coordinate of the first image that the microscope loading platform begins to measure; Plane scanning, the microscopic image of the sample is obtained through the microscope and the camera, and the images of the focal plane in the horizontal and vertical directions are obtained, and then the focal plane range image of the three-dimensional topography is obtained through image processing, and the three-dimensional topography of the object is s...
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