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Method for preparing single-wall carbon nano-tube by employing diamond nano particles

A single-walled carbon nanotube and nanoparticle technology, which is applied in the fields of nanostructure manufacturing, nanotechnology, nanotechnology, etc., can solve problems such as unfavorable single-walled carbon nanotube application and inability to completely remove catalyst particles.

Inactive Publication Date: 2008-07-09
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Metal pollution is also a kind of pollution that needs to be strictly limited in the field of integrated circuit manufacturing ("Semiconductor Manufacturing Technology" Electronic Industry Press, 2005), so single-walled carbon nanotubes contaminated by metal catalysts will not be conducive to the production of single-walled carbon nanotubes. Applications in Nanoelectronic Devices
[0006] Although scholars have developed a variety of methods for removing catalysts in carbon nanotubes (Li, X., etc. Carbon44, 1699-1705 (2006); AuBuchon, J.F., etc. 2005); Lim, H. et al. Jpn.J.Appl.Phys.41, 4686-4688(2002); Huang, W. et al. Carbon 41, 2585-2590(2003)), however even these treatments cannot completely Removal of catalyst particles contained in carbon nanotubes (Pumera, M. et al. Langmuir 23, 6453-6458 (2007))

Method used

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  • Method for preparing single-wall carbon nano-tube by employing diamond nano particles
  • Method for preparing single-wall carbon nano-tube by employing diamond nano particles

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Embodiment 1

[0017] First disperse 0.05 g of 5-10nm diamond nanoparticles in 200 ml of absolute ethanol, 2 SiO with a thickness of 50nm 2 The / Si substrate is placed in the diamond suspension and soaked for 10-30 minutes, and after the substrate is dried, the substrate is placed in a quartz tube in a horizontal resistance furnace experimental device. The substrate was heated to 900°C under an argon atmosphere, and 1000 ml / min of methane and 100 ml / min of hydrogen were introduced. After 60 minutes of reaction, the methane and hydrogen were turned off, and the electric furnace was cooled to room temperature under an argon atmosphere. In SiO 2 / Si substrate can be obtained by the single-walled carbon nanotubes prepared by diamond nanoparticles (as shown in Figure 1 and Figure 2). Through scanning electron microscopy, transmission electron microscopy and other equipment detection, it is found that the diameter of single-walled carbon nanotubes is 1-6 nm, and most of them are directly about 5...

Embodiment 2

[0019] This embodiment follows the following process: about 0.05 g of 15 nm diamond nanoparticles are dispersed in 200 ml of absolute ethanol to form a diamond-ethanol solution. Take a small amount of the diamond-ethanol solution with a medical syringe, and drop 2-3 drops on the Si substrate. After the substrate is dry, place the substrate in a quartz tube in a horizontal resistance furnace experimental device. The substrate was heated to 1100°C under an argon atmosphere, 50 ml / min of methane and 100 ml / min of hydrogen were introduced, the methane and hydrogen were turned off after 60 minutes of reaction, and the electric furnace was cooled to room temperature under an argon atmosphere. Single-walled carbon nanotubes prepared from diamond nanoparticles can be obtained on the Si substrate (as shown in FIG. 3 ).

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Abstract

The invention discloses a process for preparing single-walled carbon nano-tubes, which belongs to the preparing field of nanometer materials. The invention adopts diamond nanometer particles as catalyst or nucleating templates, uses feed gas containing carbons as the growth gas source of carbon nano-tubes, and uses chemical vapor deposition to prepare single-walled carbon nano-tubes in a horizontal resistance furnace. Because the invention adopts diamond nanometer particles as catalysts or nucleating templates to avoid pollution to the single-walled carbon nanotubes caused by non-carbon elements which are brought from adopting any metal catalyst to prepare single-walled carbon nanotubes. The invention has no need to concern about the problem that conventional metal catalysts lose catalytic effect by aggregation, and simultaneously has the advantages of high catalytic efficiency and simple operation.

Description

technical field [0001] The invention relates to a method for preparing single-wall carbon nanotubes by using diamond nanoparticles, belonging to the field of nanomaterial preparation. Background technique [0002] Single-walled carbon nanotubes are a typical one-dimensional nanomaterial. Single-walled carbon nanotubes have excellent physical and electrical properties, so they have great application potential in the establishment of single-walled carbon nanotube-based VLSI and the construction of single-walled carbon nanotube-based nanoelectronic devices. Transistors (FETs) and logic circuits based on single-walled carbon nanotubes have been successfully constructed and demonstrated to have high electrical performance. [0003] The preparation of carbon nanotubes has been developed for more than ten years, and researchers have developed a variety of catalyst materials for the preparation of single-walled carbon nanotubes. These catalyst materials include commonly used monom...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B31/02B82B3/00
Inventor 饶伏波李铁王跃林
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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