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Boundary acoustic wave device

A boundary wave and boundary technology, applied in the direction of impedance network, electrical components, etc., can solve the problem of no special representation, etc., and achieve the effect of reducing the temperature coefficient of delay time, reducing TCD, and reducing costs

Inactive Publication Date: 2008-07-02
MURATA MFG CO LTD
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  • Abstract
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  • Claims
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Problems solved by technology

However, there is no particular indication regarding the specific configuration of using SH-type boundary waves when using quartz

Method used

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Embodiment Construction

[0054] Hereinafter, the present invention will be clarified by describing specific embodiments of the present invention with reference to the accompanying drawings.

[0055] FIG. 1( a ) and FIG. 1( b ) are a schematic front sectional view and a schematic top sectional view of a boundary acoustic wave device according to an embodiment of the present invention.

[0056] The boundary acoustic wave device 1 of the present embodiment has a quartz substrate 2 and a dielectric 3 made of polysilicon laminated on the quartz substrate 2 . Between the quartz substrate 2 and the dielectric 3, an electrode configuration as schematically shown in FIG. 1(b) is formed. This electrode structure has an IDT4 and reflectors 5 and 6 arranged on both sides of the IDT4 in the propagation direction of the acoustic boundary wave. The IDT 4 and the reflectors 5 and 6 are made of a metal which will be described later. For IDT4, as shown in the figure, the intersection width weighting is performed, and...

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Abstract

The invention discloses a boundary acoustic wave device (1). A quartz substrate (2) at least forms IDT (4) and an electric medium (3) is formed by the manner of covering IDT (4). The boundary acoustic wave is broadcasted at the boundary of the quartz substrate (2). The thickness of the IDT (4) is determined so that the velocity of the SH boundary acoustic wave falls below those of a slow transverse wave propagating across the quartz substrate (2) and a slow transverse wave propagating across the dielectric (3). The Eulerian angles of the quartz substrate (2) lie in the range with inclined line in Fig 13, thereby capable of using cheap quartz substrate, adopting SH boundary acoustic wave and improving the physics performance and characteristics of machine coupling coefficient K<2>.

Description

technical field [0001] The present invention relates to a boundary acoustic wave device using boundary acoustic waves propagating at the boundary between first and second media, specifically, to a boundary acoustic wave device in which the first medium is quartz and the second medium is dielectric. Background technique [0002] Conventionally, characteristic surface wave devices have been widely used to configure oscillators and bandpass filters in various electronic devices such as television receivers and mobile phones. In a surface acoustic wave device, at least one type of IDT (Interdigital Transformer) is formed on a piezoelectric substrate. As the piezoelectric substrate, LiTaO 3 substrate or quartz substrate, etc. [0003] with LiTaO 3 Compared with the surface acoustic wave filter of the substrate, the surface acoustic wave filter using the quartz substrate is suitable for narrow-band applications. Therefore, surface acoustic wave resonators using quartz substrat...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/145H03H9/25
CPCH03H9/02551H03H9/0222H03H9/25
Inventor 神藤始
Owner MURATA MFG CO LTD
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