Method for producing two-dimensional polymer photon crystal using flexible offset printing
A lithography and photonic crystal technology, which is applied in the field of soft lithography to make two-dimensional polymer photonic crystals, can solve the problems of low modulus of PDMS templates, and achieve the effect of high fidelity and high production capacity
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[0032] Example 1: Fabrication of two-dimensional ultraviolet acrylic polymer photonic crystals.
[0033] Materials used in the examples are as follows:
[0034] The ultraviolet acrylic polymer model WIR30-470 is produced and sold by ChemOptics, Korea.
[0035] The electronic etchant is ZEP520A, produced and sold by Japan ZEON Company.
[0036] ZED-N50 solvent: developer for electronic etching adhesive ZEP520A, produced and sold by Japan ZEON Company.
[0037] The PDMS model is Sylgard 184, with a specific gravity of 1.11 and a viscosity of 5000cSt, produced and sold by Dow Coming.
[0038] Proceed as follows:
[0039] (1) Substrate fabrication of triangular cavity structure
[0040]Using JEOL JBX6000 electron beam lithography (EBL) equipment, a layer of electronic etching glue (ER) ZEP520A is coated on the silicon substrate, the pattern is determined and printed by EBL, and the exposed electronic etching glue is in ZED-N50 solvent After development, bake on a baking tray ...
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