Method for inhibiting metallic corrosion

Abstract

A process for preventing metal from corrosion is used to substrate materials containing metals is carried out by: making the substrate surfaces contacting with reacting solution that is mixed with ozone to form oxidized layer on the said substrate surfaces so as to stop oxidation and corrosion furthermore. The reacting solution can be regulated in some parameters, e.g. oxidation reduction performance, pH value, etc. to change corrosive reactivity of the reacting solution.

Description

technical field [0001] The invention relates to a metal corrosion suppression method, in particular to a metal corrosion suppression method applicable to precision electronic components. Background technique [0002] Metal materials are widely used in the industry, including precision components such as semiconductor electronic components and optoelectronic displays, all of which need to use metal materials, such as aluminum (Al), copper (Cu), molybdenum (Mo), chromium (Cr), titanium (Ti), etc., as the connecting wire in the component. In the process of lithography, etching, and cleaning of components, these metal materials often corrode due to contact with related process chemicals and wet process conditions (such as temperature, pH value) such as water washing, which in turn affects the quality of the product . [0003] The corrosion mechanism of metal materials is because the metal forms a battery reaction with the substances in the environment, that is, the redox react...

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Problems solved by technology

However, most of the chemicals used in the above methods are toxic or biodegradable materials, which will cause adverse effects on the environment

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