A crystal silicon solar battery thermal diffusion method for making PN node
A technology of solar cells and thermal diffusion, applied in the direction of circuits, electrical components, semiconductor devices, etc., can solve problems affecting the quality of PN junctions, thermal stress bending, fragmentation, etc., to improve production stability and quality consistency, and improve short circuit Current, the effect of reducing production costs
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[0009] Embodiment 1. Take a crystalline silicon chip after cleaning and surface treatment and place it in a diffusion furnace. Set some specific gas flow rates depending on the type of diffusion impurity source and the specification of the quartz tube of the diffusion furnace. The diffusion temperature of the diffusion phosphorus impurity source is 800°C ~950°C, the time to diffuse the phosphorus impurity source is (10-40) minutes, after the end of the diffusion of the phosphorus impurity source, start to cool down, and the cooling time is (10-60) minutes, when the temperature of the silicon wafer is 200°C-300°C lower than the diffusion temperature Leave the high temperature diffusion furnace and enter the next process.
[0010] The results of the two methods are compared in the following table:
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