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Piezoelectric film cantilever beam type micro-force sensor micro-force loading device

A micro-force sensor and cantilever beam technology, which is applied in the field of static and quasi-static testing and calibration, can solve problems such as micro-newton force loading instability control, and achieve simple and reliable structure, improved calibration accuracy, and convenient operation.

Inactive Publication Date: 2007-10-24
DALIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Solved the problem of instability and difficult control of micro-newton force loading

Method used

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  • Piezoelectric film cantilever beam type micro-force sensor micro-force loading device
  • Piezoelectric film cantilever beam type micro-force sensor micro-force loading device
  • Piezoelectric film cantilever beam type micro-force sensor micro-force loading device

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Experimental program
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Embodiment Construction

[0014] The implementation of the present invention will be described in detail below in conjunction with the accompanying drawings. Firstly, the piezoelectric thin film cantilever micro force sensor 27 is processed by bulk silicon processing technology and surface processing technology. Fix the cantilever beam type micro-force sensor 27 on the stage 28, and then place the stage 28 on the shock-absorbing platform 29 to be tested. During measurement and calibration, all devices are integrated and fixed on the shock-absorbing platform 29, and all devices and devices are covered with a windshield.

[0015] This kind of micro force loading device used for the calibration of piezoelectric film cantilever beam type micro force sensor is suitable for working in a clean room with a constant temperature environment of 23°C. First drill a blind hole with a diameter of 1mm at the center of the square fixing block 22, and fix the microprobe 21 in the blind hole with an adhesive; , fixed ...

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Abstract

The invention relates to a micro force load device of piezoelectric film suspension beam micro force sensor, belonging to sensor and test technical field, used for the static and quasi-static test and label of piezoelectric film suspension beam micro force sensor, wherein a micro force load device is composed of a one-dimension micro displacement table, a two-dimension micro displace table, a piezoelectric dual-crystal micro force generator, and a damping device. The one-dimension micro displacement table is composed of an X-axis micrometer element and a one-dimension micro displacement table base. The two-dimension micro displace table is composed of a Y-axis micrometer element, a Z-axis micrometer element, a two-dimension micro displacement table base, a support plate and a socket head cap screw. The piezoelectric dual-crystal micro force generator III is composed of a micro probe, a fixing block, two piezoelectric ceramic plates, an aluminum plate, a clamping plate and a socket head cap screw. The invention has simple and reliable structure, easy operation, and improved resolution of micro force loading system, to resolve the problems as instability and hard control of micro Newton force load.

Description

technical field [0001] The invention belongs to the technical field of sensors and testing, in particular to static and quasi-static testing and calibration of piezoelectric film cantilever beam type micro force sensors. Background technique [0002] Piezoelectric film cantilever micro force sensor is a new type of sensor based on MEMS technology, which has been widely used in precision testing instruments such as scanning force microscopes. In order to detect whether the force sensor meets the required technical performance indicators, before using the force sensor, it must be tested comprehensively in terms of technology and performance, that is, dynamic and static calibration. At present, in the static and quasi-static calibration system of the cantilever beam micro force sensor using the vertical loading method, the micro force is generally applied to the metal needle tip by the mass block or spring, and then the direction of the force is kept perpendicular to the sample...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/18
Inventor 崔岩董维杰王兢陈会林王立鼎
Owner DALIAN UNIV OF TECH
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