Bridge type grating light modulator and array thereof
A light modulator and bridge-type technology, applied in the direction of instruments, optics, optical components, etc., can solve the problems of low effective diffraction area of GLV and difficult integration into area array, etc., and achieve fast modulation speed, high light extraction efficiency, and high yield rate Effect
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[0027] Below in conjunction with accompanying drawing and embodiment the present invention is further described:
[0028] Figure 1a A side view of the structure of the single-pixel bridge grating light modulator of the present invention is shown. Among them, a layer of oxide layer 2 is formed on the silicon substrate 1 through thermal oxidation; then sputtering (or vapor deposition) and patterning the bottom reflective surface 3; and then depositing a transparent insulating layer 4 on the bottom reflective surface 3; The insulating layer 4 is spin-coated with a sacrificial layer to etch the supporting pillars; then sputtering (or evaporation) bridge elastic beams 5; by depositing a second layer of sacrificial layer and sputtering (or evaporation) processes, the top reflection layer is formed Surface 6, and then etch the required grating on it, which is the upper electrode; finally release the sacrificial layer to obtain the structure shown in Figure 1. The incident light is ...
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