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Raster translation optical modulator and array

A light modulator, translational technology, applied in the direction of instruments, optics, optical components, etc., can solve the problems of low effective diffraction area of ​​GLV and difficulty in integration, achieve fast modulation speed, simple manufacturing process, and reduce pixel gap Effect

Inactive Publication Date: 2005-08-24
CHONGQING UNIV
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AI Technical Summary

Problems solved by technology

[0008] In order to overcome the shortcoming of complex DMD process and the low effective diffraction area of ​​GLV, which is difficult to be integrated into an area array, the purpose of the present invention is to provide a grating translational light modulator, which adopts the diffraction principle similar to GLV to detect the incident light Perform phase modulation, increase the effective use area of ​​the device, improve optical efficiency and contrast, and simplify the manufacturing process

Method used

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  • Raster translation optical modulator and array
  • Raster translation optical modulator and array
  • Raster translation optical modulator and array

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Embodiment Construction

[0030] Below in conjunction with accompanying drawing and embodiment the present invention is further described:

[0031] figure 1 In this process, a layer of oxide 2 is deposited and grown on a silicon substrate 1, and then an etching insulating layer 3 and a negative electrode 4 are deposited, and the bottom reflective surface 5 is plated, and a top reflective surface 6 is formed by depositing a sacrificial layer, and then Etch the required grating on it, the grating is the positive electrode, and finally release the sacrificial layer to get the following figure 1 structure shown. The incident light is actually double-modulated by the top grating and the hollowed-out bottom grating. The modulation effect varies with the distance between the two gratings, and its principle is similar to that of a rectangular groove phase grating. The distance between them can be adjusted by the bias voltage applying device 8 . The top reflective layer 6 is supported by four rotationally sy...

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Abstract

This invention relates to a grating translational optical modulator and the array, the optical modulator includes: a silicon base plate with insulating layer and negative electrode, the bottom reflecting face plated on the negative electrode, the top reflecting face that is on the bottom reflecting face and whose four borders connect with the cantilever, the top reflecting face is etched to rectangle groove and form the grating, a polarizing voltage adding device is between the top and the bottom reflecting faces. This device makes use of the changeable depth of the rectangle grating to adjust the phasic of the incident light. It has the strong points of high efficiency of light outgoing, fast adjustment, strong contrast and brightness and well-proportioned. And meanwhile, it has simple manufacturing techniques and high ratio of standard productions.

Description

technical field [0001] The present invention relates to a light beam modulating device, more specifically, the present invention relates to a grating translation light modulator and array, and the device uses a variable-depth rectangular groove grating to modulate the phase of incident light. Background technique [0002] With the development of digital technology, large-screen display, especially the maturity of high-definition digital TV technology, many designers and inventors have managed to develop optical modulators that can be used alone or with other modulators, which are based on MOEMS technology The manufactured optical modulators have achieved high-speed development and wide application due to their excellent performance. They have common advantages when applied to display devices: high light extraction efficiency, high definition, fast modulation speed, more gray levels, compatible with digital TV technical indicators, excellent contrast, brightness and uniformit...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/00G02F1/01
Inventor 黄尚廉张智海闫许付红桥张洁伍艺
Owner CHONGQING UNIV
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