The invention discloses a magnetic suspension zero-stiffness vibration
isolator with an angular decoupling function by the aid of a rolling joint bearing and a
vibration isolation system with the magnetic suspension zero-stiffness vibration
isolator. Space between a sleeve of a vibration
isolator body and a lower mounting plate is carried by a magnetic suspension
thrust bearing, space between a
piston barrel and the sleeve is respectively lubricated and supported by an air floatation plane, the degree of freedom of angular movement between an upper mounting plate and the lower mounting plate is decoupled by the rolling joint bearing, and
voice coil motors, displacement sensors, limit switches, a controller and a driver form a position closed-loop
feedback control system to precisely control relative positions of the upper mounting plate and the lower mounting plate. The magnetic suspension zero-stiffness vibration isolator and the
vibration isolation system have the advantages of approximately zero three-dimensional stiffness, high positioning precision, the angular decoupling function, capability of acquiring extremely low
natural frequency and outstanding low-frequency / ultra-low-frequency
vibration isolation performance, and accordingly effectively realize high-performance vibration isolation for ultra-precision measuring instruments and
processing equipment, and particularly for step-scan
lithography machines.