80results about How to "Outstanding ultra-low frequency vibration isolation performance" patented technology

A rolling knuckle bearing angle decoupling electromagnetic damping zero-stiffness vibration isolator belongs to the technical field of precision vibration isolation. Lubrication and supporting between a sleeve of a vibration isolator main body and a lower installation plate and between a piston cylinder and the sleeve are carried out through an air floatation face respectively, an electromagnetic damping device is used for damping vibration energy and improving location stability, freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through a rolling knuckle bearing, and a position closed loop feedback control system is formed by a voice coil motor, a displacement sensor, a limit switch, a controller and a driver to accurately control relative locations of the upper installation plate and the lower installation plate. The vibration isolator has characteristics of zero three-dimensional stiffness, high positional accuracy and angular decoupling, can have low inherent frequency and prominent low frequency and ultra-low frequency vibration isolation performance, and can effectively solve high-performance vibration isolation problems of ultra-precise measurement device and processing equipment, in particular to a step scanning photoetching machine.

An eddy current damping vibration isolator of double-layer air-flotation orthogonal decoupling and two-dimensional flexible hinge angle decoupling belongs to the technical field of precise vibration isolation. An air-flotation face is used for lubricating and supporting between a sleeve of a vibration isolator main body and an air-flotation plate. An eddy current damper is used for attenuating vibration energy and improving stability. An air-flotation face is respectively used for lubricating and supporting between the air-flotation plate and a lower installing plate, between the air-flotation plate and a piston cylinder and between the air-flotation plate and the sleeve. A horizontal linear motion freedom degree between an upper installing plate and the lower installing plate is decoupled through a double-layer orthogonal air-flotation guide track, and an angle motion freedom degree is decoupled through a two-dimensional flexible hinge. A voice coil motor, a displacement sensor, a limit switch, a controller and a driver form a position closed loop feedback control system so as to conduct precise control for relative positions of the upper installing plate and the lower installing plate. The eddy current damping vibration isolator has the advantage of being free of rigidity in three dimensions, high in location precision and capable of decoupling the linear motion freedom degree and the angle motion freedom degree and can effectively satisfy the demands of ultra precise measurement instruments and machining devices especially stepping scanning photoetching machines for the high-performance vibration isolator.

The invention discloses an eddy-current damping vibration isolator with a coplanar air floatation orthogonal decoupling function and an angular decoupling function by the aid of a sliding joint bearing, and belongs to the technical field of precision vibration isolation. Space between a sleeve of a vibration isolator body and a lower mounting plate and space between a piston barrel and the sleeve are respectively lubricated and supported by air floatation planes, eddy-current dampers are used for attenuating vibration energy and improving the positioning stability, the degree of freedom of horizontal linear movement between an upper mounting plate and the lower mounting plate is decoupled by coplanar orthogonal air floatation guide rails, the degree of freedom of angular movement between the upper mounting plate and the lower mounting plate is decoupled by the sliding joint bearing, and voice coil motors, displacement sensors, limit switches, a controller and a driver form a position closed-loop feedback control system to precisely control relative positions of the upper mounting plate and the lower mounting plate. The eddy-current damping vibration isolator has the advantages of zero three-dimensional stiffness, high positioning precision and capabilities of decoupling the degree of freedom of linear movement and decoupling the degree of freedom of angular movement, and can effectively realize high-performance vibration isolation for ultra-precision measuring instruments and processing equipment, and particularly for step-scan lithography machines.

The invention discloses an electromagnetic damping vibration isolator with a coplanar air floatation orthogonal decoupling function and an angular decoupling function by the aid of a flexible membrane, and belongs to the technical field of precision vibration isolation. Space between a sleeve of a vibration isolator body and a lower mounting plate is lubricated and supported by an air floatation plane, electromagnetic dampers are used for attenuating vibration energy and improving the positioning stability, the degree of freedom of horizontal linear movement between an upper mounting plate and the lower mounting plate is decoupled by coplanar orthogonal air floatation guide rails, the degree of freedom of angular movement between the upper mounting plate and the lower mounting plate is decoupled by the flexible membrane, and voice coil motors, displacement sensors, limit switches, a controller and a driver form a position closed-loop feedback control system to precisely control relative positions of the upper mounting plate and the lower mounting plate. The electromagnetic damping vibration isolator has the advantages of zero three-dimensional stiffness, high positioning precision and capabilities of sufficiently decoupling the degree of freedom of linear movement and sufficiently decoupling the degree of freedom of angular movement, and can effectively realize high-performance vibration isolation for ultra-precision measuring instruments and processing equipment, and particularly for step-scan lithography machines.

The invention provides a magnetic levitation stiffness vibration isolator with a two-dimensional flexible hinge angle decoupling characteristic and a vibration isolating system and belongs to the technical field of precise vibration isolating technologies. A sleeve of a vibration isolator main body and a lower installing plate are born though a magnetic levitation thrust bearing, a piston barrel and the sleeve are respectively lubricated and supported through air floating faces, and angle motion freedom between an upper installing plate and the lower installing plate is decoupled through a two-dimensional flexible hinge. A voice coil motor, a displacement sensor, a limiting switch, a controller and a driver form a position closed loop feedback control system for accurately controlling opposite positions of the upper installing plate and the lower installing plate. The magnetic levitation stiffness vibration isolator has the three-dimensional zero stiffness, high positional accuracy and angle decoupling characteristics, can obtain ultra-low inherent frequency and prominent low-frequency / ultra-low-frequency vibration isolating performance, and accordingly and effectively solves the high-performance vibration isolating problem of a precise measuring instrument, a processing device and especially a step scan photo-etching machine.

The invention discloses a zero-rigidity vibration isolator with coplace air flotation orthogonal decoupling and rolling knuckle bearing angle decoupling and belongs to the technical field of precise vibration isolation. A sleeve of the main body of the vibration isolator and a lower installation plate are lubricated and supported by an air flotation surface, a piston sleeve and the sleeve are lubricated and supported by the air flotation surface, the freedom of the horizontal linear motion between an upper installation plate and the lower installation plate is decoupled through a coplace orthogonal air flotation guide rail, the freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through a rolling knuckle bearing, and a voice coil motor, a displacement sensor, a limiting switch and controller and a driver form a position closed-loop feedback control system to accurately control the relative positions of the upper installation plate and the lower installation plate. The zero-rigidity vibration isolator has the advantages of being zero in three-dimensional rigidity, high in positioning accuracy, and capable of performing linear motion freedom decoupling and angular motion freedom decoupling, and can effectively solve the high-performance vibration isolation problem of ultra-precise measurement instruments and processing equipment, particularly step scanning photoetching machines.

The invention discloses an electromagnetic damping vibration isolator with coplace air flotation orthogonal decoupling and rolling knuckle bearing angle decoupling and belongs to the technical field of precise vibration isolation. A sleeve of the main body of the vibration isolator and a lower installation plate are lubricated and supported by an air flotation surface, a piston sleeve and the sleeve are lubricated and supported by the air flotation surface, an electromagnetic damper is used for attenuating vibrating energy and improving positioning stability, the freedom of the horizontal linear motion between an upper installation plate and the lower installation plate is decoupled through a coplace orthogonal air flotation guide rail, the freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through a rolling knuckle bearing, and a voice coil motor, a displacement sensor, a limiting switch and controller and a driver form a position closed-loop feedback control system to accurately control the relative positions of the upper installation plate and the lower installation plate. The electromagnetic damping vibration isolator has the advantages of being zero in three-dimensional rigidity, high in positioning accuracy, and capable of performing linear motion freedom decoupling and angular motion freedom decoupling, and can effectively solve the high-performance vibration isolation problem of ultra-precise measurement instruments and processing equipment, particularly step scanning photoetching machines.

The invention provides a zero stiffness vibration isolator for flexible membrane angle decoupling and a vibration isolation system formed by the same and belongs to the technical field of precision vibration isolation. A sleeve of a vibration isolator main body and a lower installation plate are lubricated and supported through an air floating surface, angular motion freedom degree between an upper installation plate and the lower installation plate is decoupled through a flexible membrane, a position closed-loop feedback control system is formed by a voice coil motor, a displacement sensor, a limit switch, a controller and an actuator to perform accurate control on the relative position of the upper installation plate and the lower installation plate. The zero stiffness vibration isolator for the flexible membrane angle decoupling and the vibration isolation system formed by the zero stiffness vibration isolator have the advantages of being free of three-dimensional stiffness, high in positioning accuracy and angle decoupling and capable of obtaining very low inherent frequency and prominent low frequency / ultra-low frequency vibration isolation performance, thereby effectively solving problem of high-performance vibration isolation in ultra-precise measurement devices and processing devices, in particular to step scanning photoetching machines.

A coplane air floatation orthogonal decoupling and flexible membrane angle decoupling zero-stiffness vibration isolator belongs to the technical field of precision vibration isolation. Lubrication and supporting between a sleeve of a vibration isolator main body and a lower installation plate are carried out through an air floatation face, freedom of horizontal rectilinear motion between an upper installation plate and the lower installation plate is decoupled through a coplane orthogonal air floatation guide rail, freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through a flexible membrane, and a position closed loop feedback control system is formed by a voice coil motor, a displacement sensor, a limit switch, a controller and a driver to accurately control relative locations of the upper installation plate and the lower installation plate. The vibration isolator has characteristics of zero three-dimensional stiffness, high positional accuracyand rectilinear motion freedom and angular motion freedom decoupling, and can effectively solve high-performance vibration isolation problems of ultra-precise measurement device and processing equipment, in particular to a step scanning photoetching machine.