80results about How to "Outstanding ultra-low frequency vibration isolation performance" patented technology

The invention discloses a magnetic suspension zero-stiffness vibration isolator with an angular decoupling function by the aid of a rolling joint bearing and a vibration isolation system with the magnetic suspension zero-stiffness vibration isolator. Space between a sleeve of a vibration isolator body and a lower mounting plate is carried by a magnetic suspension thrust bearing, space between a piston barrel and the sleeve is respectively lubricated and supported by an air floatation plane, the degree of freedom of angular movement between an upper mounting plate and the lower mounting plate is decoupled by the rolling joint bearing, and voice coil motors, displacement sensors, limit switches, a controller and a driver form a position closed-loop feedback control system to precisely control relative positions of the upper mounting plate and the lower mounting plate. The magnetic suspension zero-stiffness vibration isolator and the vibration isolation system have the advantages of approximately zero three-dimensional stiffness, high positioning precision, the angular decoupling function, capability of acquiring extremely low natural frequency and outstanding low-frequency / ultra-low-frequency vibration isolation performance, and accordingly effectively realize high-performance vibration isolation for ultra-precision measuring instruments and processing equipment, and particularly for step-scan lithography machines.

A zero rigidity vibration isolator and a vibration isolation system for angularly decoupling sliding oscillating bearing belong to the technical field of precise vibration isolation. Air floatation surfaces are respectively arranged between a sleeve of a vibration isolator main body and a lower mounting plate as well as a piston cylinder and the sleeve to lubricate and support, the angular motion freedom between an upper mounting plate and the lower mounting plate is decoupled through the sliding oscillating bearing, a voice coil motor, a displacement sensor, a limiting switch, and a controller and an actuator form a closed position loop feedback control system which is used for precisely controlling the relative positions of the upper mounting plate and the lower mounting plate. The vibration isolator has the characteristics of zero rigidity along the vertical direction and the horizontal direction, high positioning precision and angular decoupling, can obtain extremely low inherent frequency and excellent low frequency / ultralow frequency vibration isolation performance, and accordingly, the high-performance isolation vibration problem of ultra precise measurement instruments and processing equipment, in particular step-scan steppers can be solved effectively.

The invention belongs to the technical field of precision vibration isolation, and relates to a zero-stiffness vibration isolator with a rolling oscillating bearing angle degree decoupling function and a vibration isolation system. A sleeve of a vibration isolator body and a lower mounting plate as well as a piston barrel and the sleeve are lubricated and supported through air floatation surfaces respectively, degree of freedom of angular motion between an upper mounting plate and the lower mounting plate is decoupled by a rolling oscillating bearing, and voice coil motors, displacement sensors, limit switches, a controller and a drive form a closed position loop feedback control system which is used for precision control of relative position of the upper mounting plate and the lower mounting plate. The zero-stiffness vibration isolator has the advantages of zero three-dimension stiffness, high positioning precision and angle degree decoupling and can obtain extremely-low-intrinsic-frequency and outstanding low-frequency / ultralow frequency vibration isolation performances, and accordingly high-performance vibration isolation of ultraprecise measuring instruments, machining equipment and particularly step-scan lithography machines is achieved.

A rolling knuckle bearing angle decoupling electromagnetic damping zero-stiffness vibration isolator belongs to the technical field of precision vibration isolation. Lubrication and supporting between a sleeve of a vibration isolator main body and a lower installation plate and between a piston cylinder and the sleeve are carried out through an air floatation face respectively, an electromagnetic damping device is used for damping vibration energy and improving location stability, freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through a rolling knuckle bearing, and a position closed loop feedback control system is formed by a voice coil motor, a displacement sensor, a limit switch, a controller and a driver to accurately control relative locations of the upper installation plate and the lower installation plate. The vibration isolator has characteristics of zero three-dimensional stiffness, high positional accuracy and angular decoupling, can have low inherent frequency and prominent low frequency and ultra-low frequency vibration isolation performance, and can effectively solve high-performance vibration isolation problems of ultra-precise measurement device and processing equipment, in particular to a step scanning photoetching machine.

The invention discloses an eddy-current damping vibration isolator with coplace air flotation orthogonal decoupling and two-dimensional flexible hinge angle decoupling and belongs to the technical field of precise vibration isolation. A sleeve of the main body of the vibration isolator and an air flotation plate are lubricated and supported by an air flotation surface, a piston sleeve and the sleeve are lubricated and supported by the air flotation surface, an eddy-current damper is used for attenuating vibrating energy and improving positioning stability, the freedom of the horizontal linear motion between an upper installation plate and a lower installation plate is decoupled through a coplace orthogonal air flotation guide rail, the freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through a two-dimensional flexible hinge, and a voice coil motor, a displacement sensor, a limiting switch and controller and a driver form a position closed-loop feedback control system to accurately control the relative positions of the upper installation plate and the lower installation plate. The eddy-current damping vibration isolator has the advantages of being zero in three-dimensional rigidity, high in positioning accuracy, and capable of performing linear motion freedom decoupling and angular motion freedom decoupling, and can effectively meet the high-performance requirements of ultra-precise measurement instruments and processing equipment, particularly step scanning photoetching machines.

A coplane air floatation orthogonal decoupling and air floatation ball bearing angle decoupling magnetic levitation vibration isolator belongs to the technical field of precision vibration isolation. Lubrication and supporting between a sleeve of a vibration isolator main body and a lower installation plate and between a piston cylinder and the sleeve are carried out through a magnetic levitation thrust bearing and a static pressure air floatation face respectively, freedom of horizontal rectilinear motion between an upper installation plate and the lower installation plate is decoupled through a coplane orthogonal air floatation guide rail, freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through an air floatation ball bearing, a position closed loop feedback control system is formed by a voice coil motor, a displacement sensor, a limit switch, a controller and a driver, and relative locations of the upper installation plate and the lower installation plate are accurately controlled. The vibration isolator has characteristics of zero three-dimensional stiffness, high positional accuracy and rectilinear motion freedom and angular motion freedom decoupling, and can effectively solve high-performance vibration isolation problems of ultra-precise measurement device and processing equipment, in particular to a step scanning photoetching machine.

The invention provides an eddy current damping zero stiffness vibration isolator for flexible membrane angle decoupling and belongs to the technical field of precision vibration isolation. A sleeve of a vibration isolator main body and a lower installation plate are lubricated and supported through an air floating surface, an eddy current damper attenuates vibration energy and improves positioning stability, angular motion freedom degree between an upper installation plate and the lower installation plate is decoupled through a flexible membrane, a position closed-loop feedback control system is formed by a voice coil motor, a displacement sensor, a limit switch, a controller and an actuator to perform accurate control on the relative position of the upper installation plate and the lower installation plate. The eddy current damping zero stiffness vibration isolator for the flexible membrane angle decoupling has the advantages of being free of three-dimensional stiffness, high in positioning accuracy and angle decoupling and capable of obtaining very low inherent frequency and prominent ultra-low frequency vibration isolation performance, thereby effectively solving problem of high-performance vibration isolation in ultra-precise measurement devices and processing devices, in particular to step scanning photoetching machines.

The invention discloses an electromagnetic damping vibration isolator with a coplanar air floatation orthogonal decoupling function and an angular decoupling function by the aid of a flexible membrane, and belongs to the technical field of precision vibration isolation. Space between a sleeve of a vibration isolator body and a lower mounting plate is lubricated and supported by an air floatation plane, electromagnetic dampers are used for attenuating vibration energy and improving the positioning stability, the degree of freedom of horizontal linear movement between an upper mounting plate and the lower mounting plate is decoupled by coplanar orthogonal air floatation guide rails, the degree of freedom of angular movement between the upper mounting plate and the lower mounting plate is decoupled by the flexible membrane, and voice coil motors, displacement sensors, limit switches, a controller and a driver form a position closed-loop feedback control system to precisely control relative positions of the upper mounting plate and the lower mounting plate. The electromagnetic damping vibration isolator has the advantages of zero three-dimensional stiffness, high positioning precision and capabilities of sufficiently decoupling the degree of freedom of linear movement and sufficiently decoupling the degree of freedom of angular movement, and can effectively realize high-performance vibration isolation for ultra-precision measuring instruments and processing equipment, and particularly for step-scan lithography machines.

An eddy current damping vibration isolator of double-layer air-flotation orthogonal decoupling and flexible film angle decoupling belongs to the technical field of precise vibration isolation. An air-flotation face is used for lubricating and supporting between a sleeve of a vibration isolator main body and an air-flotation plate. An eddy current damper is used for attenuating vibration energy. An air-flotation face is used for lubricating and supporting between the air-flotation plate and a lower installing plate. A horizontal linear motion freedom degree between an upper installing plate and the lower installing plate is decoupled through a double-layer orthogonal air-flotation guide track, and an angle motion freedom degree between the upper installing plate and the lower installing plate is decoupled through a flexible film. A voice coil motor, a displacement sensor, a limit switch, a controller and a driver form a position closed loop feedback control system so as to conduct precise control for relative positions of the upper installing plate and the lower installing plate. The eddy current damping vibration isolator has the advantage of being free of rigidity in three dimensions, high in location precision and capable of fully decoupling the linear motion freedom degree and the angle motion freedom degree and can effectively achieve high-performance vibration isolation in ultra precise measurement instruments and machining devices, especially stepping scanning photoetching machines.

A zero-rigidity vibration isolator of double-layer air-flotation orthogonal decoupling and two-dimensional flexible hinge angle decoupling belongs to the technical field of precise vibration isolation. An air-flotation face is respectively used for lubricating and supporting between a sleeve of a vibration isolator main body and an air-flotation plate, between the air-flotation plate and a lower installing plate, between the air-flotation plate and a piston cylinder and between the air-flotation plate and the sleeve. A horizontal linear motion freedom degree between an upper installing plate and the lower installing plate is decoupled through a double-layer orthogonal air-flotation guide track, and an angle motion freedom degree between the upper installing plate and the lower installing plate is decoupled through a two-dimensional flexible hinge. A voice coil motor, a displacement sensor, a limit switch, a controller and a driver form a position closed loop feedback control system so as to conduct precise control for relative positions of the upper installing plate and the lower installing plate. The zero-rigidity vibration isolator has the advantage of being free of rigidity in three dimensions, high in location precision and capable of decoupling the linear motion freedom degree and the angle motion freedom degree and can effectively satisfy the demands of ultra precise measurement instruments and machining devices especially stepping scanning photoetching machines for the high-performance vibration isolator.

A coplane air floatation orthogonal decoupling and air floatation ball bearing angle decoupling electromagnetic damping vibration isolator belongs to the technical field of precision vibration isolation. Lubrication and supporting between a sleeve of a vibration isolator main body and a lower installation plate and between a piston cylinder and the sleeve are carried out through an air floatation face respectively, an electromagnetic damping device is used for damping vibration energy and improving location stability, freedom of horizontal rectilinear motion between an upper installation plate and the lower installation plate is decoupled through a coplane orthogonal air floatation guide rail, freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through an air floatation ball bearing, and a position closed loop feedback control system is formed by a voice coil motor, a displacement sensor, a limit switch, a controller and a driver to accurately control relative locations of the upper installation plate and the lower installation plate. The vibration isolator has characteristics of zero three-dimensional stiffness, high positional accuracy and rectilinear motion freedom and angular motion freedom decoupling, and can effectively solve high-performance vibration isolation problems of ultra-precise measurement device and processing equipment, in particular to a step scanning photoetching machine.

The invention discloses a magnetic suspension planar-drive positioning vibration isolator with a coplanar air floatation orthogonal decoupling function and an angular decoupling function by the aid of a flexible membrane, and belongs to the technical field of precision vibration isolation. Space between a sleeve of a vibration isolator body and a lower mounting plate is carried under a magnetic suspension effect of a magnetic suspension planar motor, the degree of freedom of horizontal linear movement between an upper mounting plate and the lower mounting plate is decoupled by coplanar orthogonal air floatation guide rails, the degree of freedom of angular movement between the upper mounting plate and the lower mounting plate is decoupled by the flexible membrane, and motors, displacement sensors, limit switches, a controller and a driver form a position closed-loop feedback control system to precisely control relative positions of the upper mounting plate and the lower mounting plate. The magnetic suspension planar-drive positioning vibration isolator has the advantages of zero three-dimensional stiffness, high positioning precision and capabilities of sufficiently decoupling the degree of freedom of linear movement and sufficiently decoupling the degree of freedom of angular movement, and can effectively realize high-performance vibration isolation for ultra-precision measuring instruments and processing equipment, and particularly for step-scan lithography machines.

The invention discloses a magnetic suspension vibration isolator with a coplanar air floatation orthogonal decoupling function and an angular decoupling function by the aid of a sliding joint bearing, and belongs to the technical field of precision vibration isolation. Space between a sleeve of a vibration isolator body and a lower mounting plate is carried by a magnetic suspension thrust bearing, space between a piston barrel and the sleeve is lubricated and supported by an air floatation plane, the degree of freedom of horizontal linear movement between an upper mounting plate and the lower mounting plate is decoupled by coplanar orthogonal air floatation guide rails, the degree of freedom of angular movement between the upper mounting plate and the lower mounting plate is decoupled by the sliding joint bearing, and voice coil motors, displacement sensors, limit switches, a controller and a driver form a position closed-loop feedback control system to precisely control relative positions of the upper mounting plate and the lower mounting plate. The magnetic suspension vibration isolator has the advantages of approximately zero three-dimensional stiffness, high positioning precision and capabilities of decoupling the degree of freedom of linear movement and decoupling the degree of freedom of angular movement, and can effectively realize high-performance vibration isolation for ultra-precision measuring instruments and processing equipment, and particularly for step-scan lithography machines.

A zero-stiffness vibration isolator for double-layered aerostatic orthogonal decoupling and sliding knuckle bearing angular decoupling belongs to the technical field of precision vibration isolation. A sleeve and an aerostatic plate of a vibration isolator body are lubricated and supported by an aerostatic surface in between, the aerostatic plate and a lower mounting plate of the vibration isolator body are lubricated and supported by an aerostatic surface in between, a piston barrel and the sleeve of the vibration isolator body are lubricated and supported by an aerostatic surface in between, the degree of freedom of horizontal linear motion between the upper mounting plate and the lower mounting plate is decoupled by two layers of orthogonal aerostatic slideways, the degree of freedom of angular motion between the upper mounting plate and the lower mounting plate is decoupled by a sliding knuckle bearing, and voice coil motors, displacement sensors, limit switches, a controller and a driver are formed into a closed-loop feedback position control system, which can accurately control the relative position between the upper mounting plate and the lower mounting plate. The zero-stiffness vibration isolator has the characteristics of three-dimensional zero stiffness, high positioning precision and decoupling of the degree of freedom of linear motion and the degree of freedom of angular motion, and can effectively solve the problem of high-performance vibration isolation in ultra-precision measuring instruments and machining equipment, particularly in step scanning lithographic machines.

The invention discloses an eddy-current damping vibration isolator with coplace air flotation orthogonal decoupling and rolling knuckle bearing angle decoupling and belongs to the technical field of precise vibration isolation. A sleeve of the main body of the vibration isolator and a lower installation plate are lubricated and supported by an air flotation surface, a piston sleeve and the sleeve are lubricated and supported by the air flotation surface, an eddy-current damper is used for attenuating vibrating energy and improving positioning stability, the freedom of the horizontal linear motion between an upper installation plate and the lower installation plate is decoupled through a coplace orthogonal air flotation guide rail, the freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through a rolling knuckle bearing, and a voice coil motor, a displacement sensor, a limiting switch and controller and a driver form a position closed-loop feedback control system to accurately control the relative positions of the upper installation plate and the lower installation plate. The eddy-current damping vibration isolator has the advantages of being zero in three-dimensional rigidity, high in positioning accuracy, and capable of performing linear motion freedom decoupling and angular motion freedom decoupling, and can effectively solve the high-performance vibration isolation problem of ultra-precise measurement instruments and processing equipment, particularly step scanning photoetching machines.

A rolling knuckle bearing angle decoupling electromagnetic damping zero-stiffness vibration isolator belongs to the technical field of precision vibration isolation. Lubrication and supporting between a sleeve of a vibration isolator main body and a lower installation plate and between a piston cylinder and the sleeve are carried out through an air floatation face respectively, an electromagnetic damping device is used for damping vibration energy and improving location stability, freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through a rolling knuckle bearing, and a position closed loop feedback control system is formed by a voice coil motor, a displacement sensor, a limit switch, a controller and a driver to accurately control relative locations of the upper installation plate and the lower installation plate. The vibration isolator has characteristics of zero three-dimensional stiffness, high positional accuracy and angular decoupling, can have low inherent frequency and prominent low frequency and ultra-low frequency vibration isolation performance, and can effectively solve high-performance vibration isolation problems of ultra-precise measurement device and processing equipment, in particular to a step scanning photoetching machine.

An eddy current damping vibration isolator of double-layer air-flotation orthogonal decoupling and two-dimensional flexible hinge angle decoupling belongs to the technical field of precise vibration isolation. An air-flotation face is used for lubricating and supporting between a sleeve of a vibration isolator main body and an air-flotation plate. An eddy current damper is used for attenuating vibration energy and improving stability. An air-flotation face is respectively used for lubricating and supporting between the air-flotation plate and a lower installing plate, between the air-flotation plate and a piston cylinder and between the air-flotation plate and the sleeve. A horizontal linear motion freedom degree between an upper installing plate and the lower installing plate is decoupled through a double-layer orthogonal air-flotation guide track, and an angle motion freedom degree is decoupled through a two-dimensional flexible hinge. A voice coil motor, a displacement sensor, a limit switch, a controller and a driver form a position closed loop feedback control system so as to conduct precise control for relative positions of the upper installing plate and the lower installing plate. The eddy current damping vibration isolator has the advantage of being free of rigidity in three dimensions, high in location precision and capable of decoupling the linear motion freedom degree and the angle motion freedom degree and can effectively satisfy the demands of ultra precise measurement instruments and machining devices especially stepping scanning photoetching machines for the high-performance vibration isolator.

The invention discloses an eddy-current damping vibration isolator with a coplanar air floatation orthogonal decoupling function and an angular decoupling function by the aid of a sliding joint bearing, and belongs to the technical field of precision vibration isolation. Space between a sleeve of a vibration isolator body and a lower mounting plate and space between a piston barrel and the sleeve are respectively lubricated and supported by air floatation planes, eddy-current dampers are used for attenuating vibration energy and improving the positioning stability, the degree of freedom of horizontal linear movement between an upper mounting plate and the lower mounting plate is decoupled by coplanar orthogonal air floatation guide rails, the degree of freedom of angular movement between the upper mounting plate and the lower mounting plate is decoupled by the sliding joint bearing, and voice coil motors, displacement sensors, limit switches, a controller and a driver form a position closed-loop feedback control system to precisely control relative positions of the upper mounting plate and the lower mounting plate. The eddy-current damping vibration isolator has the advantages of zero three-dimensional stiffness, high positioning precision and capabilities of decoupling the degree of freedom of linear movement and decoupling the degree of freedom of angular movement, and can effectively realize high-performance vibration isolation for ultra-precision measuring instruments and processing equipment, and particularly for step-scan lithography machines.

The invention discloses an electromagnetic damping vibration isolator with a coplanar air floatation orthogonal decoupling function and an angular decoupling function by the aid of a flexible membrane, and belongs to the technical field of precision vibration isolation. Space between a sleeve of a vibration isolator body and a lower mounting plate is lubricated and supported by an air floatation plane, electromagnetic dampers are used for attenuating vibration energy and improving the positioning stability, the degree of freedom of horizontal linear movement between an upper mounting plate and the lower mounting plate is decoupled by coplanar orthogonal air floatation guide rails, the degree of freedom of angular movement between the upper mounting plate and the lower mounting plate is decoupled by the flexible membrane, and voice coil motors, displacement sensors, limit switches, a controller and a driver form a position closed-loop feedback control system to precisely control relative positions of the upper mounting plate and the lower mounting plate. The electromagnetic damping vibration isolator has the advantages of zero three-dimensional stiffness, high positioning precision and capabilities of sufficiently decoupling the degree of freedom of linear movement and sufficiently decoupling the degree of freedom of angular movement, and can effectively realize high-performance vibration isolation for ultra-precision measuring instruments and processing equipment, and particularly for step-scan lithography machines.

The invention provides a magnetic levitation stiffness vibration isolator with a two-dimensional flexible hinge angle decoupling characteristic and a vibration isolating system and belongs to the technical field of precise vibration isolating technologies. A sleeve of a vibration isolator main body and a lower installing plate are born though a magnetic levitation thrust bearing, a piston barrel and the sleeve are respectively lubricated and supported through air floating faces, and angle motion freedom between an upper installing plate and the lower installing plate is decoupled through a two-dimensional flexible hinge. A voice coil motor, a displacement sensor, a limiting switch, a controller and a driver form a position closed loop feedback control system for accurately controlling opposite positions of the upper installing plate and the lower installing plate. The magnetic levitation stiffness vibration isolator has the three-dimensional zero stiffness, high positional accuracy and angle decoupling characteristics, can obtain ultra-low inherent frequency and prominent low-frequency / ultra-low-frequency vibration isolating performance, and accordingly and effectively solves the high-performance vibration isolating problem of a precise measuring instrument, a processing device and especially a step scan photo-etching machine.

The invention discloses a zero-rigidity vibration isolator with coplace air flotation orthogonal decoupling and rolling knuckle bearing angle decoupling and belongs to the technical field of precise vibration isolation. A sleeve of the main body of the vibration isolator and a lower installation plate are lubricated and supported by an air flotation surface, a piston sleeve and the sleeve are lubricated and supported by the air flotation surface, the freedom of the horizontal linear motion between an upper installation plate and the lower installation plate is decoupled through a coplace orthogonal air flotation guide rail, the freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through a rolling knuckle bearing, and a voice coil motor, a displacement sensor, a limiting switch and controller and a driver form a position closed-loop feedback control system to accurately control the relative positions of the upper installation plate and the lower installation plate. The zero-rigidity vibration isolator has the advantages of being zero in three-dimensional rigidity, high in positioning accuracy, and capable of performing linear motion freedom decoupling and angular motion freedom decoupling, and can effectively solve the high-performance vibration isolation problem of ultra-precise measurement instruments and processing equipment, particularly step scanning photoetching machines.

A coplane air floatation orthogonal decoupling and air floatation ball bearing angle decoupling magnetic levitation vibration isolator belongs to the technical field of precision vibration isolation. Lubrication and supporting between a sleeve of a vibration isolator main body and a lower installation plate and between a piston cylinder and the sleeve are carried out through a magnetic levitation thrust bearing and a static pressure air floatation face respectively, freedom of horizontal rectilinear motion between an upper installation plate and the lower installation plate is decoupled through a coplane orthogonal air floatation guide rail, freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through an air floatation ball bearing, a position closed loop feedback control system is formed by a voice coil motor, a displacement sensor, a limit switch, a controller and a driver, and relative locations of the upper installation plate and the lower installation plate are accurately controlled. The vibration isolator has characteristics of zero three-dimensional stiffness, high positional accuracy and rectilinear motion freedom and angular motion freedom decoupling, and can effectively solve high-performance vibration isolation problems of ultra-precise measurement device and processing equipment, in particular to a step scanning photoetching machine.

The invention discloses an electromagnetic damping vibration isolator with coplace air flotation orthogonal decoupling and rolling knuckle bearing angle decoupling and belongs to the technical field of precise vibration isolation. A sleeve of the main body of the vibration isolator and a lower installation plate are lubricated and supported by an air flotation surface, a piston sleeve and the sleeve are lubricated and supported by the air flotation surface, an electromagnetic damper is used for attenuating vibrating energy and improving positioning stability, the freedom of the horizontal linear motion between an upper installation plate and the lower installation plate is decoupled through a coplace orthogonal air flotation guide rail, the freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through a rolling knuckle bearing, and a voice coil motor, a displacement sensor, a limiting switch and controller and a driver form a position closed-loop feedback control system to accurately control the relative positions of the upper installation plate and the lower installation plate. The electromagnetic damping vibration isolator has the advantages of being zero in three-dimensional rigidity, high in positioning accuracy, and capable of performing linear motion freedom decoupling and angular motion freedom decoupling, and can effectively solve the high-performance vibration isolation problem of ultra-precise measurement instruments and processing equipment, particularly step scanning photoetching machines.

The invention provides a zero stiffness vibration isolator for flexible membrane angle decoupling and a vibration isolation system formed by the same and belongs to the technical field of precision vibration isolation. A sleeve of a vibration isolator main body and a lower installation plate are lubricated and supported through an air floating surface, angular motion freedom degree between an upper installation plate and the lower installation plate is decoupled through a flexible membrane, a position closed-loop feedback control system is formed by a voice coil motor, a displacement sensor, a limit switch, a controller and an actuator to perform accurate control on the relative position of the upper installation plate and the lower installation plate. The zero stiffness vibration isolator for the flexible membrane angle decoupling and the vibration isolation system formed by the zero stiffness vibration isolator have the advantages of being free of three-dimensional stiffness, high in positioning accuracy and angle decoupling and capable of obtaining very low inherent frequency and prominent low frequency / ultra-low frequency vibration isolation performance, thereby effectively solving problem of high-performance vibration isolation in ultra-precise measurement devices and processing devices, in particular to step scanning photoetching machines.

The invention belongs to the technical field of precision vibration isolation and relates to a double-layer orthogonal air floatation decoupling and flexible membrane angular decoupling magnetic levitation zero-rigidity vibration isolator. A magnetic levitation thrust bearing is used for bearing between a sleeve of a vibration isolator body and an air floatation plate, an air floatation surface is used for lubricating and supporting between the air floatation plate and a lower mounting plate, degree of freedom of horizontal linear motion between an upper mounting plate and the lower mounting plate is decoupled by double-layer orthogonal air floatation guide rails, degree of freedom of angular motion between the upper mounting plate and the lower mounting plate is decoupled by a flexible membrane, and voice coil motors, displacement sensors, limit switches, a controller and a drive form a position closed-loop feedback control system so as to precisely control the relative position of the upper mounting plate and the lower mounting plate. The magnetic levitation zero-rigidity vibration isolator has the advantages of zero three-dimensional rigidity, high positioning precision, decoupling of degree of freedom of linear motion and degree of freedom of angular motion and the like, and is capable of effectively achieving high-performance vibration isolation in ultra-precise measuring instruments and processing equipment, particularly in step-scan lithography machines.

The invention belongs to the technical field of precision vibration isolation, and relates to a zero-stiffness vibration isolator with a rolling oscillating bearing angle degree decoupling function and a vibration isolation system. A sleeve of a vibration isolator body and a lower mounting plate as well as a piston barrel and the sleeve are lubricated and supported through air floatation surfaces respectively, degree of freedom of angular motion between an upper mounting plate and the lower mounting plate is decoupled by a rolling oscillating bearing, and voice coil motors, displacement sensors, limit switches, a controller and a drive form a closed position loop feedback control system which is used for precision control of relative position of the upper mounting plate and the lower mounting plate. The zero-stiffness vibration isolator has the advantages of zero three-dimension stiffness, high positioning precision and angle degree decoupling and can obtain extremely-low-intrinsic-frequency and outstanding low-frequency / ultralow frequency vibration isolation performances, and accordingly high-performance vibration isolation of ultraprecise measuring instruments, machining equipment and particularly step-scan lithography machines is achieved.

The invention discloses a magnetic levitation vibration isolator with coplace air flotation orthogonal decoupling and rolling knuckle bearing angle decoupling and belongs to the technical field of precise vibration isolation. A sleeve of the main body of the vibration isolator and a lower installation plate are born by a magnetic levitation thrust bearing, a piston sleeve and the sleeve are respectively lubricated and supported by an air flotation surface, the freedom of the horizontal linear motion between an upper installation plate and the lower installation plate is decoupled through a coplace orthogonal air flotation guide rail, the freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through a rolling knuckle bearing, and a voice coil motor, a displacement sensor, a limiting switch and controller and a driver form a position closed-loop feedback control system to accurately control the relative positions of the upper installation plate and the lower installation plate. The magnetic levitation vibration isolator has the advantages of being zero in three-dimensional rigidity, high in positioning accuracy, and capable of performing linear motion freedom decoupling and angular motion freedom decoupling, and can effectively solve the high-performance vibration isolation problem of ultra-precise measurement instruments and processing equipment, particularly step scanning photoetching machines.

A coplane air floatation orthogonal decoupling and flexible membrane angle decoupling zero-stiffness vibration isolator belongs to the technical field of precision vibration isolation. Lubrication and supporting between a sleeve of a vibration isolator main body and a lower installation plate are carried out through an air floatation face, freedom of horizontal rectilinear motion between an upper installation plate and the lower installation plate is decoupled through a coplane orthogonal air floatation guide rail, freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through a flexible membrane, and a position closed loop feedback control system is formed by a voice coil motor, a displacement sensor, a limit switch, a controller and a driver to accurately control relative locations of the upper installation plate and the lower installation plate. The vibration isolator has characteristics of zero three-dimensional stiffness, high positional accuracyand rectilinear motion freedom and angular motion freedom decoupling, and can effectively solve high-performance vibration isolation problems of ultra-precise measurement device and processing equipment, in particular to a step scanning photoetching machine.

The invention belongs to the technical field of precise vibration isolation and discloses a zero-rigidity vibration isolator with double-layer air flotation orthogonal decoupling and rolling knuckle bearing angular decoupling. A sleeve of a vibration isolator and an air flotation plate, the air flotation plate and a lower mounting plate, and a piston barrel and a sleeve are lubricated and supported through air flotation faces, the freedom degree of horizontal linear motion between an upper mounting plate and the lower mounting plate is decoupled through a double-layer orthogonal air flotation guide rail, the freedom degree of angular motion between the upper mounting plate and the lower mounting plate is decoupled through a rolling knuckle bearing, and a voice coil motor, a displacement sensor, a limiting switch, a controller and a drive form a position closed-loop feedback control system to precisely control relative positions of the upper mounting plate and the lower mounting plate. The zero-rigidity vibration isolator has the advantages of three-dimensional zero rigidity, high positioning precision, decoupling of linear motion freedom degree and angular motion freedom degree, and high-performance vibration isolation in ultra precise measurement instruments and processing equipment, especially in step scanning photoetching machines can be effectively achieved.

An eddy current damping vibration isolator of double-layer air-flotation orthogonal decoupling and rolling knuckle bearing angle decoupling belongs to the technical field of precise vibration isolation. An air-flotation face is used for lubricating and supporting between a sleeve of a vibration isolator main body and an air-flotation plate. An eddy current damper is used for attenuating vibration energy and improving stability. An air-flotation face is respectively used for lubricating and supporting between the air-flotation plate and a lower installing plate, between the air-flotation plate and a piston cylinder and between the air-flotation plate and the sleeve. A horizontal linear motion freedom degree between an upper installing plate and the lower installing plate is decoupled through a double-layer orthogonal air-flotation guide track, and an angle motion freedom degree is decoupled through a rolling knuckle bearing. A voice coil motor, a displacement sensor, a limit switch, a controller and a driver form a position closed loop feedback control system so as to conduct precise control for relative positions of the upper installing plate and the lower installing plate. The eddy current damping vibration isolator has the advantage of being free of rigidity in three dimensions, high in location precision and capable of decoupling the linear motion freedom degree and the angle motion freedom degree and can effectively achieve high-performance vibration isolation in ultra precise measurement instruments and machining devices, especially stepping scanning photoetching machines.