Eddy current damping zero stiffness vibration isolator for flexible membrane angle decoupling

An eddy current damping and vibration isolator technology, used in springs/shock absorbers, vibration suppression adjustment, non-rotational vibration suppression, etc. The range of stiffness reduction is limited, and the vibration isolator cannot achieve precise positioning, so as to solve the effect of low positioning accuracy

Active Publication Date: 2013-04-24
HARBIN INST OF TECH
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  • Abstract
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  • Application Information

AI Technical Summary

Problems solved by technology

The problems of this method are as follows: 1) Due to the constraints of material properties and structural stiffness, the amplitude of vertical and horizontal stiffness reduction of the vibration isolator is limited; 2) The vertical and horizontal positioning accuracy of the air spring vibration isolator is very poor, It cannot meet the requirements of the photolithography process; 3) To achieve a lower horizontal stiffness requires a larger pendulum length, resulting in excessive height of the vibration isolator, prone to string-film resonance, and poor stability
The problems of this solution are: 1) In the disclosed technical solution, the vibration isolator cannot achieve precise positioning; 2) In the patent EP1803965A2, there is no degree of freedom of angular movement around the horizontal axis between the upper and lower mounting plates. The angular stiffness and natural frequency are very high; patents EP1803970A2 and US20080193061A1 use rubber blocks to provide angular freedom of rotation around the horizontal axis for the upper and lower mounting plates, but due to the high angular stiffness of the rubber blocks, the angular freedom of motion cannot be effectively achieved Degree decoupling, the friction between the decoupling mechanism components of the angular motion freedom introduces additional stiffness, which restricts the vibration isolation performance
However, the proposed technical solution still does not solve the problem of decoupling the precise positioning of the vibration isolator and the angular motion freedom of the upper and lower mounting plates.

Method used

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  • Eddy current damping zero stiffness vibration isolator for flexible membrane angle decoupling
  • Eddy current damping zero stiffness vibration isolator for flexible membrane angle decoupling
  • Eddy current damping zero stiffness vibration isolator for flexible membrane angle decoupling

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Embodiment Construction

[0033] Specific embodiments of the present invention are given below in conjunction with the accompanying drawings.

[0034] An eddy current damping zero-stiffness vibration isolator with flexible membrane angle decoupling, consisting of an upper mounting plate 1, a lower mounting plate 2, a clean compressed air source 3, an air pipe 26 and a vibration isolator body 4, the vibration isolator body 4 is installed Between the upper mounting plate 1 and the lower mounting plate 2, the clean compressed air source 3 is connected to the vibration isolator main body 4 through the air pipe 26. In the structure of the vibration isolator main body 4, the lower surface of the sleeve 6 and the lower mounting plate 2 Lubricated and supported by the axial bearing plane air bearing surface 21, the flexible membrane 5 is installed on the upper end of the sleeve 6, and is compressed and sealed by the pressure ring 22, and the upper pressure plate 7a and the lower pressure plate 7b of the pressur...

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Abstract

The invention provides an eddy current damping zero stiffness vibration isolator for flexible membrane angle decoupling and belongs to the technical field of precision vibration isolation. A sleeve of a vibration isolator main body and a lower installation plate are lubricated and supported through an air floating surface, an eddy current damper attenuates vibration energy and improves positioning stability, angular motion freedom degree between an upper installation plate and the lower installation plate is decoupled through a flexible membrane, a position closed-loop feedback control system is formed by a voice coil motor, a displacement sensor, a limit switch, a controller and an actuator to perform accurate control on the relative position of the upper installation plate and the lower installation plate. The eddy current damping zero stiffness vibration isolator for the flexible membrane angle decoupling has the advantages of being free of three-dimensional stiffness, high in positioning accuracy and angle decoupling and capable of obtaining very low inherent frequency and prominent ultra-low frequency vibration isolation performance, thereby effectively solving problem of high-performance vibration isolation in ultra-precise measurement devices and processing devices, in particular to step scanning photoetching machines.

Description

technical field [0001] The invention belongs to the technical field of precision vibration isolation, and mainly relates to an eddy current damping zero-stiffness vibration isolator with flexible membrane angle decoupling. Background technique [0002] With the continuous improvement of ultra-precision machining and measurement accuracy, environmental vibration has become an important factor restricting the improvement of the accuracy and performance of ultra-precision machining equipment and measuring instruments. In particular, the ultra-large-scale integrated circuit processing equipment represented by the step-scan lithography machine is extremely technically intensive and complex, and the key technical indicators have reached the limit of the existing technology, representing the highest level of ultra-precision processing equipment. Precision vibration isolation has become the core key technology in this type of equipment; the line width of the step-and-scan lithograph...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16F15/027F16F15/03F16F6/00G03F7/20
Inventor 谭久彬崔俊宁王雷
Owner HARBIN INST OF TECH
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