Eddy current damping vibration isolator with coplanar air bearing orthogonal decoupling and rolling joint bearing angle decoupling

Abstract

The invention discloses an eddy-current damping vibration isolator with coplace air flotation orthogonal decoupling and rolling knuckle bearing angle decoupling and belongs to the technical field of precise vibration isolation. A sleeve of the main body of the vibration isolator and a lower installation plate are lubricated and supported by an air flotation surface, a piston sleeve and the sleeve are lubricated and supported by the air flotation surface, an eddy-current damper is used for attenuating vibrating energy and improving positioning stability, the freedom of the horizontal linear motion between an upper installation plate and the lower installation plate is decoupled through a coplace orthogonal air flotation guide rail, the freedom of angular motion between the upper installation plate and the lower installation plate is decoupled through a rolling knuckle bearing, and a voice coil motor, a displacement sensor, a limiting switch and controller and a driver form a position closed-loop feedback control system to accurately control the relative positions of the upper installation plate and the lower installation plate. The eddy-current damping vibration isolator has the advantages of being zero in three-dimensional rigidity, high in positioning accuracy, and capable of performing linear motion freedom decoupling and angular motion freedom decoupling, and can effectively solve the high-performance vibration isolation problem of ultra-precise measurement instruments and processing equipment, particularly step scanning photoetching machines.

Description

technical field [0001] The invention belongs to the technical field of precision vibration isolation, and mainly relates to an electric eddy current damping vibration isolator for coplanar air bearing orthogonal decoupling and rolling joint bearing angle decoupling. Background technique [0002] With the continuous improvement of ultra-precision machining and measurement accuracy, environmental vibration has become an important factor restricting the improvement of the accuracy and performance of ultra-precision machining equipment and measuring instruments. In particular, the ultra-large-scale integrated circuit processing equipment represented by the step-scan lithography machine is extremely technically intensive and complex, and the key technical indicators have reached the limit of the existing technology, representing the highest level of ultra-precision processing equipment. Precision vibration isolation has become the core key technology in this type of equipment; th...

AI Technical Summary

Problems solved by technology

The problems of this method are as follows: 1) Due to the constraints of material properties and structural stiffness, the amplitude of vertical and horizontal stiffness reduction of the vibration isolator is limited; 2) The vertical and horizontal positioning accuracy of the air spring vibration isolator is very poor, It cannot meet the requirements of the photolithography process; 3) To achieve a lower horizontal stiffness requires a larger pendulum length, resulting in excessive height of the vibration isolator, prone to string-film resonance, and poor stability

The problems of this solution are: 1) In the disclosed technical solution, the vibration isolator cannot achieve precise positioning; 2) In the patent EP1803965A2, there is no degree of freedom of angular movement around the horizontal axis between the upper and lower mounting plates. The angular stiffness and natural frequency are very high; patents EP1803970A2 and US20080193061A1 use rubber blocks to provide the upper and lower mounting plates with angular motion self-curvature around the horizontal axis, but due to the high angular stiffness of the rubber blocks, angular motion cannot be effectively performed Degree of freedom decoupling, angular motion degree of freedom decoupling friction between the mechanism components introduces additional stiffness, restricting vibration isolation performance

However, the proposed technical solution still does not solve the problem of decoupling the precise positioning of the vibration isolator and the angular motion freedom of the upper and lower mounting plates.

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