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Scanning electron microscope with measurement function

a scanning electron microscope and function technology, applied in the direction of material analysis using wave/particle radiation, semiconductor/solid-state device testing/measurement, instruments, etc., can solve the problems of difficult to check, troublesome to revise and check stored amp data, etc., to achieve efficient and easy measurement

Inactive Publication Date: 2008-05-08
OJIMA YUUKI +3
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0016] An object of the present invention is to provide a scanning electron microscope which efficiently and easily makes measurements for plural measurement items and a measurement method which use it.
[0017] Another object of the present invention is to make it easy to store, check, and revise auto measurement parameters to make measurements for plural measurement items.
[0018] According to one aspect of the present invention, parameters for creation of a line profile from an SEM image are specified for common use for plural measurement items and entered as auto measurement parameters (AMP entry). Here, “AMP entry” means that parameters are specified in an AMP window and saved in a storage. Also, plural edge detection methods and measurement calculation methods can be entered in the AMP window so that measurements for plural items can be made easily.

Problems solved by technology

Therefore, in semi-auto measurement, if several types of measurements are to be made, it is necessary to specify a set of AMP for each measurement type, which is very troublesome.
In full-auto measurement, if several types of measurements are to be made, required AMP data is stored in a recipe file and thus operation is easy, but it is troublesome to revise and check the stored AMP data.
A resulting measurement value is displayed in a window of the SEM upon execution of measurement; when several types of measurements are made, it is not easy to check numerical measurement values so the operator has to wait for completion of the whole measurement process until a list of measurement results appears.

Method used

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  • Scanning electron microscope with measurement function
  • Scanning electron microscope with measurement function
  • Scanning electron microscope with measurement function

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Embodiment Construction

[0036] Next, preferred embodiments of the present invention will be described referring to the accompanying drawings.

[0037]FIG. 15 shows the general structure of a scanning electron microscope with a measurement function according to an embodiment of the present invention (see Patent Document 1). An electron beam 2 emitted from an electron gun 1 is narrowed by an objective lens 6 and thrown on a sample 7. The objective lens 6 is excited by an objective lens power supply 11. A deflecting signal generator 14 sends a deflecting signal depending on a scanning area or scanning position of the electron beam 2 as indicated by a computer 21 through a deflecting amplifier 10 to a deflecting coil 5 to excite it so that the sample 7 is scanned with the electron beam 2 two-dimensionally.

[0038] A secondary signal (secondary electron signal, reflection electron signal, etc.), which is generated from the sample 7 in response to irradiation of the electron beam 2, is detected by a detector 12 and...

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Abstract

A scanning electron microscope which efficiently makes measurements for plural measurement items at a time and allows easy entry, confirmation and revision of auto measurement parameters. Parameters for creation of a line profile from an image captured by the scanning electron microscope are entered as auto measurement parameters (AMP) to be used as common conditions for all measurement items. Also, plural combinations of edge detection methods and measurement calculation methods are entered as auto measurement parameters to make measurements for plural items.

Description

CROSS-REFERENCE TO RELATED CASES [0001] The present application is a continuation of U.S. application Ser. No. 11 / 398,522, filed Apr. 6, 2006, which is a continuation of U.S. application Ser. No. 10 / 779,848, filed Feb. 18, 2004, now U.S. Pat. No. 7,053,371, issued May 30, 2006, which claims the benefit of Japanese Application No. 2003-044290, filed on Feb. 21, 2003, the disclosures of which are herewith incorporated by reference in their entirety.FIELD OF THE INVENTION [0002] The present invention relates to a scanning electron microscope with a measurement function and a measurement method which uses it. BACKGROUND OF THE INVENTION [0003] The following patent documents (gazettes) describe conventional techniques in this field: [0004] Patent Document 1: JP-A No. 347246 / 1994 [0005] Patent Document 2: JP-A No. 22794 / 1996 [0006] Patent Document 3: JP-A No. 237231 / 1999 [0007] Patent Document 4: JP-A No. 213427 / 1998 [0008] Patent Document 5: JP-A No. 201919 / 1999 [0009] A scanning electro...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): G06F3/048G01B15/00G01N23/225H01J37/22H01J37/28H01L21/66
CPCG01N23/2251H01J37/265H01J2237/2817H01J2237/221H01J2237/2816H01J37/28
Inventor OJIMA, YUUKISASADA, KATSUHIROUEDA, KAZUHIROMORIMOTO, TSUYOSHI
Owner OJIMA YUUKI
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