Method of inhibiting metal corrosion

Abstract

A method of inhibiting metal corrosion is applicable to a metal-containing substrate, which has a surface in contact with a reaction solution. The method includes the steps of mixing ozone with the reaction solution and forming a metal oxide protective layer on the surface of the metal-containing substrate, so as to prevent metal beneath the protective layer from being continuously oxidized and corroded. In the method, the reaction solution contacting with metal is further adjusted in its oxidation-reduction property and pH value to change the corrosivity of the reaction solution and mitigate the corrosion tendency of metal.

Description

FIELD OF THE INVENTION [0001] The present invention relates to a method of inhibiting metal corrosion, and more particularly to a method applicable to precision electronic devices to inhibit metal corrosion thereof. BACKGROUND OF THE INVENTION [0002] Metal materials are widely applied in different industrial fields. Precision devices, such as semiconductor electronic elements and photoelectric displays, all have lead wires made of metal materials, including aluminum (Al), copper (Cu), molybdenum (Mo), chromium (Cr), titanium (Ti), etc. In the process of manufacturing the devices, these metal materials are corroded due to contacting with chemical agents and water of different temperatures and pH values being used in relevant processes, such as photolithographing, stripping, etching, washing, etc. The corroded metal materials would adversely affect the product quality. [0003] A metal material is corroded because a cell reaction, or electrically polarized oxidation-reduction reaction, ...

AI Technical Summary

Benefits of technology

[0007] A primary object of the present invention is to provide a method of inhibiting metal corrosion, in which the corrosivity of a reaction solution is adjusted and controlled by adding ozone into chemical agents or water that would contact with metal lead wires in the manufacturing process.

[0008] The method of inhibiting metal corrosion according to the present invention is applicable to a metal-containing substrate, which has a surface in contact with a reaction solution. The method includes the steps of mixing ozone (O3) with the reaction solution and forming a passive metal oxide layer on the surface of the metal-containing substrate. The reaction solution added with ozone has an increased oxidizability. Since molecular ozone or free radical ozone is a very strong oxidizer, appropriate adjustment of ozone concentration in the reaction solution enables formation of a passive metal oxide layer on the metal surface to protect the metal beneath the passive layer against continuous oxidation or corrosion by the reaction solution.

[0009] The method of the present invention may further include the step of mixing the reaction solution with an additive, such as a suitable inorganic acid or any salt thereof, so as to adjust the oxidation-reduction property and the pH value of the reaction solution, in which the metal-containing substrate is disposed, and accordingly, change the corrosivity of the reaction solution and mitigate the metal corrosion tendency.

Problems solved by technology

In the process of manufacturing the devices, these metal materials are corroded due to contacting with chemical agents and water of different temperatures and pH values being used in relevant processes, such as photolithographing, stripping, etching, washing, etc.

The corroded metal materials would adversely affect the product quality.

However, most of the chemical agents used to inhibit corrosion are toxic or non-biodegradable to have adverse influences on the environment.

Therefore, it is an important issue among different industrial fields to develop a method of inhibiting metal corrosion to maintain good electrical performance for metal lead wire and protect the environment at the same time.

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