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Test specimen and production thereof

Inactive Publication Date: 2006-09-21
CANON KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0019] In the present invention, a test specimen is prepared quickly which contains components in varying ratio in a thin film in fine regions placed on a substrate for observing influences of slight change of constituting component ratio and contamination of impurity. With this test specimen, precise quantitative determination can be conducted. As shown later in

Problems solved by technology

The extreme small thickness of the thin film tends to cause a problem of dependence of the functions of the thin film on the state of the substrate for the thin film, and a problem of adverse effect of a contamination with a foreign matter or change of the quality or quantity of the thin film by pretreatment.
Such a large difference in the size causes difference between the practical thin films and the thin films for calibration samples owing to local flocculation and mixing state of the respective components, and other conditions.
However, one measurement region of the TOF-SIMS is as small as several hundreds of micrometers square, which cannot cover the entire thin film at one time.
In this method, however, precise calculation is difficult since the fluorescent X-ray intensity is not necessarily in a linear relation to the component ratio.
By the above reasons, precise quantitative determination is not practicable by any of the conventional methods.

Method used

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  • Test specimen and production thereof
  • Test specimen and production thereof
  • Test specimen and production thereof

Examples

Experimental program
Comparison scheme
Effect test

example 1

[0057] In analysis of components of a biological material by SIMS or fluorescent X-ray analysis, a trace amount of sodium (Na) or potassium (K) as a contaminant may affect the intensity of the signals. In this Example, a calibration curve was obtained for quantitative determination of phosphorus (P) by TOF-SIMS by using a standard sample of ammonium phosphate (NH4H2PO4, ammonium dihydrogenphosphate) containing Na and K as an example of quantitative determination of a biological material by using the method of the present invention.

(1) Substrate Cleaning

[0058] A silicon substrate (high-resistance p-type, commercial product) having a size of 10 mm×12 mm×1 mm was subjected to supersonic cleaning in high-purity acetone, ethanol, and ultrapure water respectively for 10 minutes.

(2) Preparation of Aqueous Solutions of Component Mixtures

[0059] Aqueous standard solutions for IPC-MS (SPEX Co.) containing respectively P (10.1%), Na (10.1%), or K (5.0%) were diluted respectively with pure...

example 2

[0070] By the technique of the present invention, an effective calibration curve can be obtained for the quantity of a product of a chemical reaction of mixture components. In this Example, a test specimen for a chemical reaction product was prepared by dropping an aqueous solution of sodium carbonate (Na2CO3) onto a film of a peptide (Morphiceptin: mass number 521 amu) formed on a substrate, and was evaluated.

[0071] An aqueous solution of Morphiceptin, a well-known intracerebral neurotransmitter, and an aqueous solution of sodium carbonate as a weak acid salt were prepared. Spots were formed by changing the quantity of the respective components by dotting in superposition by an inkjet system. The quantity of the chemical reaction product of the two components in the spot was evaluated by secondary ion intensity by TOF-SIMS.

(1) Preparation of Specimen

[0072] Morphiceptin and powdery sodium carbonate were dissolved respectively in water to prepare an aqueous Morphiceptin solution ...

example 3

[0076] This Example shows detection of plural parent peptide molecular moieties by TOF-SIMS.

(1) A silicon wafer substrate was prepared in the similar manner as in Example 1.

[0077] (2) A first synthetic peptide SEQ ID NO: 1 (GGGGCGGGGG) (hereinafter referred to as a “peptide G,” mass number: 634 amu), a second synthetic peptide SEQ ID NO: 2 (YYYYCYYYYY) (hereinafter referred to as a “peptide Y,” mass number: 1588 amu), and a powdery insulin (mass number: 5807 amu) material were dissolved respectively in 2 mL of water containing a small amount of a surfactant (0.1 wt %), the solutions having respectively a concentration of 7.9×10−5 mol / L, 1.1×10−5 mol / L, and 8.2×10−6 mol / L. The solutions are referred to respectively as a “G solution,” a “Y solution,” and an “insulin solution.”

[0078] (3) Ten matrixes (having 10 lines and 10 columns), M1 to M10 were prepared by use of the G solution and the Y solution in place of the P solution and the Na solution in Example 1 in the same manner for ...

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Abstract

A test specimen is provided which has one or more chemical substances fixed to prescribed plural independent positions on a substrate, and the quantities of the chemical substances fixed at the respective prescribed positions are the total of integer multiples of existence quantity units defined for the respective chemical substances in the range from 1 amol to 1 nmol (excluding the case in which the total quantity is zero).

Description

TECHNICAL FIELD [0001] The present invention relates to a test specimen having a chemical substance fixed at plural positions on a substrate, and to a screening method employing the test specimen. BACKGROUND ART [0002] With development of film formation technique in recent years, various materials and devices are coming to be constructed mainly of a thin film of 1 μm or thinner. Lately, high-speed film-formation techniques have been developed, which enables formation of a thin film structure by holding plural functional films on a substrate as a fine part of high functionality such as electronic devices and bio-chips. Further, thin film structures having a sensor function have become important which detect a micro quantity of a chemical reaction product by utilizing plural components in the thin film. [0003] With such improvement of the function of thin film parts, methods are being developed for more precise and finer analysis and evaluation of the thin films. The examples of the m...

Claims

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Application Information

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IPC IPC(8): C12M1/34G01N33/00B01J19/00G01N23/225B01L3/00B01L3/02G01N1/00G01N23/20G01N37/00H01J49/10H01J49/40
CPCB01L3/5085H01J49/10H01J49/40Y10T436/2575Y10T436/11Y10T436/25Y10T436/112499
Inventor KOMATSU, MANABUHASHIMOTO, HIROYUKI
Owner CANON KK
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