Semiconductor device and method therefor
a semiconductor and device technology, applied in the direction of sustainable manufacturing/processing, final product manufacturing, crystal growth process, etc., can solve the problems of formation of misfit dislocations, and a 4 percent mismatch between crystalline structure and lattice constant of desired overlying semiconductor materials
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[0016] In one embodiment a photodetector using heteroepitaxial layers is formed in a portion of an integrated circuit using silicon nanocrystals that are formed relatively close together over a silicon substrate. These nanocrystals are completely oxidized to form insulating islands over the silicon. A subsequent etch back exposes the underlying silicon but leaves the insulating islands as masks for beginning a selective epitaxial growth of germanium over the silicon. The germanium grows and immediately forms misfit dislocations a short distance from the surface of the silicon. These misfit dislocations run a short distance above and parallel to the silicon substrate and are terminated at the insulating islands. The epitaxial growth continues and ultimately comes together at the top of these insulating islands. There may be a grain boundary formed at the top of each insulating island. The insulating islands are close enough together so that the misfit dislocations terminate on these ...
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