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Electromagnetic-magnetoelectric type micro mechanical resonant beam structure

A magnetoelectric and resonant beam technology, applied in the field of resonant sensitive components, can solve problems such as difficult coupling interference, achieve the effects of eliminating self-doping effects, good structural accuracy and surface quality, and simple process

Inactive Publication Date: 2007-04-11
BEIHANG UNIV
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

In addition, there is also a prior art of a simple resonant beam using a similar process. This technology uses the impedance characteristics of the resonant beam to achieve vibration excitation and vibration pickup, and the coupling interference problem is more difficult to solve.

Method used

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Embodiment Construction

[0030] As shown in Figure 1, the present invention consists of a substrate 1 and a magnetic field The resonant beam 2 is composed of the resonant beam 2, and the base 1 is an elastic diaphragm that deforms elastically with the change of the measured physical quantity. Resonant measurement; the substrate 1 and the resonant beam 2 are made of SOI wafers, which are processed by epitaxy and etching; the two ends of the resonant beam 2 have electrodes, which are connected to the magnetic field The direction is orthogonal to each other. When the current passes through, the ampere force in the thickness direction is generated, and the induced voltage is generated at both ends when the vibration occurs. The intermittent principle is used to form a closed-loop system to completely solve the problem of coupling interference.

[0031] As shown in Fig. 4, the SOI wafer used in the substrate 1 and the resonant beam 2 consists of a single crystal silicon layer 13, SiO 2 The buried layer 1...

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Abstract

The electromagnetic-magnetoelectric micro mechanical resonant beam structure consists of matrix and resonant beam in magnetic field, and the composite sensitive structure comprising elastic matrix membrane and double-ended built-in simple resonant beam realizes the resonant measurement of physical quality. Both the matrix and the resonant beam are made with SOI wafer and through epitaxial and etching process, and the matrix with low doping and the simple resonant beam of N type doping in 1x10<19> / cu cm form an integral monocrystalline silicon structure. The resonant beam with electrodes in its two ends is orthogonal with the magnetic field and produces ampere force in the thickness direction during when some current flows in and induced voltage across it during resonance. One closed-loop system is formed based on intermittent principle to eliminate coupling interference trouble. The present invention has simple structure, improved mechanical performance and high stability.

Description

technical field [0001] The invention relates to a micromechanical resonant beam structure, which is mainly used as a resonant sensitive part in a micromechanical sensor or an inertial device. Background technique [0002] The resonant beam is the basic functional unit in MEMS devices, generally used as a secondary sensitive element and a primary sensitive element together to form a composite sensitive structure. The primary sensitive element, such as an elastic diaphragm, undergoes corresponding deformation under the action of the measured physical quantity q; the resonant beam receives the corresponding axial tension with the deformation of the primary sensitive element, and its resonant frequency f n changes accordingly, so that in f n Establish a corresponding relationship with the measured q; obtain f n q can be obtained, which is the resonance sensitive mechanism. [0003] in order to obtain f n , it is necessary to try to make the resonant beam in a resonant state,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B7/02B81B3/00B06B1/04B81C1/00G01L1/10
Inventor 樊尚春邢维巍蔡晨光
Owner BEIHANG UNIV
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