Hybrid maglev gravity compensation apparatus
A gravity compensation and magnetic levitation technology, which is applied in the field of gravity compensation devices, can solve problems such as high motor heat generation, affecting the thermal performance of the wafer holder, and air flow disturbance
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[0024] In the following, preferred embodiments according to the present invention will be described in detail with reference to the accompanying drawings.
[0025] Such as figure 1 As shown, the connecting part 102 is placed under the micro-moving wafer stage part 101, and the connecting part 102 and the top part 103 below it together form a horizontal (X / Y direction) decoupling part; the middle moving part 104 and the external fixed part 105 The vertical guide part; the middle moving part 104 and the bottom fixed part 106 form a static vertical gravity compensation part. The decoupling part and the guide part together form a moving part, and the outer fixing part 105 and the bottom fixing part 106 are stationary parts. When it is necessary to measure the vertical displacement of the gravity compensation device, a differential sensor can be used—the stator part 108 of the sensor is installed on the bottom fixed part 106 or the external fixed part 105, and the mover part 107 o...
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