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Ring oscillator type digital pressure sensor and producing method thereof

A ring oscillator and pressure sensor technology, applied in the direction of measuring fluid pressure, measuring fluid pressure through electromagnetic components, instruments, etc., can solve the problems of difficult detection of small capacitance, complex temperature compensation, and temperature drift.

Inactive Publication Date: 2007-03-21
杨旸
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  • Abstract
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  • Application Information

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Problems solved by technology

In addition, the sensitive element of the piezoresistive pressure gauge is resistance, and there is temperature drift, so it is inevitable to solve the complicated temperature compensation problem
The sensitive element of the capacitive manometer is a tiny capacitor, and it is generally difficult to make a high-sensitivity sensor
In addition, the detection of tiny capacitance is also very difficult, requiring very complex matching and processing circuits

Method used

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  • Ring oscillator type digital pressure sensor and producing method thereof
  • Ring oscillator type digital pressure sensor and producing method thereof
  • Ring oscillator type digital pressure sensor and producing method thereof

Examples

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Embodiment Construction

[0026] The present invention is a ring oscillator type digital pressure sensor, and the present invention will be further elaborated below with reference to the accompanying drawings.

[0027] As shown in Figure 1 and Figure 2, under the action of stress 2, due to the piezoresistive effect of silicon, the channel resistance of the channel region 4 between the source 1 and the drain 3 of the silicon gate 5 of the MOS transistor will change. . This is mainly because the mobility of the carriers in the channel region 4 changes with the change of the stress 2 . The variation of carrier mobility with stress 2 is related to the type and crystallographic orientation of carriers. For a PMOS transistor with a (100) crystal plane, if the direction of the stress is along the crystal direction, then the source and drain are parallel to the crystal direction PMOS transistor (that is, the current direction between the source and drain and the crystal direction) The crystal orientation ...

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Abstract

The invention discloses a digital pressure sensor of annular oscillator including the annular oscillator with at least two same electrical parameters, a mixer and a filter. The two annular oscillators are distributed in the stress sensing concentration of the silicon girder structure, the source-drain pole of one annular oscillator is parallel with the stress direction; the other is vertical with the stress direction; the mixer is set on the thick silicon of the no stress sensing and the filter is integrated in out of the slice; the output of the two annular oscillators is connected to the input of the mixer which the output is connected to the input of the filter and the output of the filter is the output of the pressure sensor. The annular oscillator is made by connecting the odd inverters using the PMOS process. The mixer is the two-grid MOS transistor mixing circuit.

Description

technical field [0001] The invention relates to a digital pressure sensor, in particular to a ring oscillator type digital pressure sensor using a ring oscillator and a silicon beam structure. The present invention also relates to a manufacturing method of the above-mentioned sensor. Background technique [0002] Automobile safety has become more and more important, and "Tire Pressure Monitoring and Alerting System (TPMS)" is the third legislation for automobile safety in the United States after seat belts and airbags. Existing tire pressure monitoring and alarm systems generally use analog sensors, which have poor accuracy and response speed, and their working conditions are affected by temperature changes. Digitization is a feature of today's era, and the digitization of the pressure sensor, the core device in the tire pressure monitoring and alarm system (TPMS), is a topic that many people hope to achieve. With the progress of research work, there are many methods to re...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L17/00G01L9/00B60C23/00
Inventor 杨旸
Owner 杨旸
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