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Mask electro-forming method for vaporization coating of organic light-emitting display

A technology for a light-emitting display and a manufacturing method, which are applied in the directions of electroforming, vacuum evaporation coating, and photo-engraving process of pattern surface, can solve the problems of unfavorable transfer of light-emitting materials, rough surface of openings, and unsmooth hole walls, etc. Achieve the effect of uniform opening, smooth hole wall and improving product accuracy

Active Publication Date: 2006-07-19
KUN SHAN POWER STENCIL
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AI Technical Summary

Problems solved by technology

The defects of this manufacturing method mainly include: (1) it must be carried out on a metal foil of a certain thickness, and the thickness of the mask is at least 0.05 mm; (2) there is lateral corrosion; (3) etching is based on chemical dissolution, The surface of the formed opening is rough, and the wall of the hole is not very smooth, which is not conducive to the complete transfer of the luminescent material to the ITO surface; (4) the precision is relatively low, the opening tolerance reaches ±0.005mm, and the hole of the mask plate with a format of 370mm×470mm The position tolerance is as high as ±0.008mm; (5) The hole size tolerance of the etching mask is ±(0.010mm~0.015mm)

Method used

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Embodiment Construction

[0040] Electroforming manufacturing method of high-precision mask for vapor deposition of small molecule OLED

[0041] The electroforming manufacturing method of this OLED vapor deposition mask has the following steps in sequence:

[0042] Mandrel preparation → mandrel pre-treatment → filming → exposure → development → degreasing → water washing → activation / passivation → water washing → electroforming mask → water washing → film removal → film stripping → screen bonding → finished product inspection → finished product packaging .

[0043] The core mold preparation step is to select a stainless steel substrate.

[0044] The pre-treatment steps of the core mold include the following sub-steps in sequence: chemical degreasing→electric degreasing→hot water washing→cold water washing→neutralization→cold water washing→air drying. The chemical degreasing step is to immerse the metal substrate in a degreasing agent at a temperature of 80°C for 28 minutes. The components of the degreasing...

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PUM

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Abstract

The mask electroforming method for OLED comprises: preparing module core, pre-treating the core; sticking mask; exposing; developing; deoiling; cleaning in water; activating / passivating; cleaning; electroforming mask; cleaning; removing mask; peeling mask; bonding with silk screen; detecting the product; packing. This invention can prepare the high-precise mask for OLED with thickness less than 0.5mm, and has opening tolerance up to í‚0.005mm; for example, for a 370mmí‡470mm mask plate, the crosshole position tolerance just is í‚0.008mm.

Description

Technical field [0001] The invention relates to the manufacture of an organic light-emitting display, in particular to an electroforming manufacturing method of a mask for vapor deposition of the organic light-emitting display. Background technique [0002] Organic Light Emitting Display (OLED) not only has the characteristics of high brightness of CRT display, low energy consumption, and light weight and thinness of LCD display, but also has the outstanding advantages of not being restricted by the environment and without backlight. Even in the sun, you can easily see the pattern text, and has the function of folding. OLED displays can be made lighter and thinner, have a larger viewing angle, and can significantly save power. The composition of the OLED includes a glass substrate with a thickness of about 1.3mm, a high-purity metal material with a thickness of less than 0.3mm and an ITO conductive glass, with a total thickness of less than 2mm. The key link in OLED manufacturing...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C25D1/00C23C14/04
CPCG03F7/12
Inventor 魏志凌高小平赵录军胡鹏程
Owner KUN SHAN POWER STENCIL
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