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Two-photon-confocal optical manufacturing equipment for 3D micromachining or high-density information storage and method thereof

A micro-fabrication, three-dimensional optics technology, applied in the direction of using optical devices, optics, measuring devices, etc., can solve problems such as cost increase, detection takes a lot of time, etc., and achieve the effect of simplifying structure, improving processing quality and resolution

Inactive Publication Date: 2005-07-06
UNIV OF SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This not only increases the cost, but also takes a lot of time to find the target when detecting

Method used

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  • Two-photon-confocal optical manufacturing equipment for 3D micromachining or high-density information storage and method thereof
  • Two-photon-confocal optical manufacturing equipment for 3D micromachining or high-density information storage and method thereof
  • Two-photon-confocal optical manufacturing equipment for 3D micromachining or high-density information storage and method thereof

Examples

Experimental program
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Embodiment Construction

[0023] Describe item by item below in conjunction with accompanying drawing.

[0024] 1. Optical system: as shown in Figure 2, when carrying out two-photon laser processing, the laser light (such as the femtosecond laser when adopting the ultrafast pulse laser) that sends out in laser device 1 passes through at first by front beam expander lens 11, rear beam expander The light source beam expander assembly composed of the lens 10 and the filter hole 2 passes through the two-photon excitation color filter 16 to filter out the stray light, and the two-photon dichroic mirror 17 reflects it into the objective lens 6, and the objective lens 6 converges it into a beam for processing. of light spots. The two-photon excitation color filter 16 can transmit the corresponding excitation light, and the two-photon dichroic mirror 17 can reflect the corresponding excitation light and transmit the fluorescence. As to the femtosecond laser of 800nm, adopt the light reflection greater than 75...

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Abstract

This invention relates to double photon and co-focus optics process device used in three-dimensional fine processing or high coded information memory and its method. The device comprises optics system, workbench and control system, wherein the optics system comprise double photon source system and single photon source system and each of them is composed of layer, beam expanding elements, color filter pad and color separation lens. The main light path system adopts remote parallel structure without limit and the two paths of the light source system color separation lens is switched to the main path through the switch structure.

Description

technical field [0001] The invention relates to optical processing technology, especially a three-dimensional optical processing and information storage system designed by using the principle of two-photon and confocal laser scanning microscope and a method for processing or storing using the system. Background technique [0002] Since its invention, confocal microscopes have been mostly used in the field of biomedicine. Its patent sees US 0313467 (Minsky, 1961). In 1990, Denk..WJ, Strikler.Jp, Webb.WW and others of Cornell University in the United States proposed to apply the phenomenon of two-photon excitation to the confocal laser scanning fluorescence microscope, and obtained the US patent (Two-photon lasermicroscopy, "United States States Patent, 5,034,613), and its related papers can be found in Two-photon laserscanning fluorescence microscopy. Science 248, 1990: 73-76. [0003] The basic principle of the optical part of the confocal laser scanning fluorescence micro...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/04G02B26/00G02B27/00
Inventor 黄文浩夏安东褚家如周拥军蒋中伟袁大军陈德强
Owner UNIV OF SCI & TECH OF CHINA
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