Method for preparing nano dot array of controllable unit size using nano ball template
A technology of nano-dot array and unit size, applied in the field of nano-dot array
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Embodiment 1
[0022] Controllable expansion of deposition channels in single-layer and double-layer polystyrene nanosphere templates (sphere diameter 200 nm) was performed by oxygen plasma etching. Then, a layer of metal aluminum is evaporated on the template, and polystyrene spheres are dissolved in toluene solvent to obtain a regularly arranged array of nano-dots.
[0023] The effect of plasma etching on the expansion of deposition channels in the template and the preparation of nanodot arrays can be characterized by scanning electron microscopy (SEM). The high-density polystyrene template can be seen from the SEM photo before the plasma etching process figure 1 In (a), it can be seen that the original deposition channel in the template is blocked due to the obvious deformation of the polystyrene sphere with a diameter of 200 nm, thus making the template unusable. figure 1 (b) shows the effect of assembling polystyrene spheres with a diameter of 440nm into a template. It can be seen that...
Embodiment 2
[0030] The implementation process is similar to that of Example 1, except that the spheres used for the template are changed to other diameters: 0.01-10 μm.
Embodiment 3
[0032] The implementation process is similar to Example 1, except that the balls used as the template are changed into nano (micro) balls of other materials, such as polybutadiene, polyisoprene, SiO 2 , Ag, Au, Co, FePt, etc.
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