Process for preparing titanium carbonitride ceramic powder body by utilizing plasma chemial gas phase synthesis method
A titanium carbonitride ceramic and plasma technology is applied in the field of preparing nano-scale and sub-micron titanium carbonitride ceramic powders, which can solve the problem of complex process, easy doping, and inability to meet high-quality titanium carbonitride ceramic products. and other problems, to achieve the effect of uniform particle size distribution and high purity
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Embodiment 1
[0018] Embodiment 1: A kind of process of preparing titanium carbonitride ceramic powder by plasma chemical vapor phase synthesis, it is characterized in that at first pass into plasma working gas N in the plasma generator 2 -H 2 -Ar, press N 2 9m 3 / h; H 2 27m 3 The flow rate of / h is continuously injected, and 30 liters / min of Ar is injected, the plasma power supply is started, and a plasma arc is generated in the plasma generator, (the Ar gas is turned off after the arc starts normally). The gas after the arc is heated to a high temperature of 4800°C and then enters the reactor, and then the TiCl evaporated by the evaporator is respectively 4 And the liquefied gas and NH delivered by the flowmeter 3 Send it into the reactor to decompose quickly, and keep the liquefied gas and NH 3 and TiCl 4 The ratio is 1:1:7 (injection liquid weight ratio per unit time) continuous injection, and the reaction temperature in the plasma reactor is kept at 1200°C. Decomposition occurs...
Embodiment 2
[0028] Embodiment 2: A kind of process of preparing titanium carbonitride ceramic powder by plasma chemical vapor phase synthesis method, it is characterized in that at first passing into plasma working gas N in the plasma generator 2 -H 2 -Ar, press N 2 11m 3 / h; H 2 30m 3 The flow rate of / h is continuously injected, and 30 liters / min of Ar is injected, the plasma power supply is started, and a plasma arc is generated in the plasma generator, (the Ar gas is turned off after the arc starts normally). The gas after the arc is heated to a high temperature of 5000°C and enters the reactor, and then the TiCl evaporated by the evaporator is separately 4 And the liquefied gas and NH delivered by the flowmeter 3 Send it into the reactor to decompose quickly, and keep the liquefied gas and NH 3 and TiCl 4 The ratio is 1:1:9 (injection liquid weight ratio per unit time) for continuous injection, and the reaction temperature in the plasma reactor is kept at 1250°C. Decompositio...
Embodiment 3
[0038] Embodiment 3: A kind of process of preparing titanium carbonitride ceramic powder by plasma chemical vapor synthesis method, it is characterized in that at first pass into plasma working gas N in the plasma generator 2 -H 2 -Ar, press N 2 13m 3 / h; H 2 32m 3 The flow rate of / h is continuously injected, and 30 liters / min of Ar is injected, the plasma power supply is started, and a plasma arc is generated in the plasma generator, (the Ar gas is turned off after the arc starts normally). The gas after the arc is heated to a high temperature of 5200°C and then enters the reactor, and then the TiCl evaporated by the evaporator is respectively 4 And the liquefied gas and NH delivered by the flowmeter 3 Send it into the reactor to decompose quickly, and keep the liquefied gas and NH 3 and TiCl 4The ratio is 1:1:11 (injection liquid weight ratio per unit time) for continuous injection, and the reaction temperature in the plasma reactor is maintained at 1300°C. Decompos...
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