EBSD sample preparation method for surface layer of metal material

Abstract

The invention provides an EBSD sample preparation method for a metal material surface layer, which comprises the following steps: according to the principle of uniform center stress, aligning the edges of two EBSD samples to be prepared or one EBSD sample to be prepared with an auxiliary sample, tightly embedding the EBSD sample and the auxiliary sample in the center of resin, and during mechanical polishing, according to the design principle of the maximum contact area of a rectangular sample, preparing the EBSD sample on the surface layer of the metal material, the included angle between the sample grinding direction and the tangent line of the contact edges of the two samples is controlled within 30 degrees, so that the contact edges are stressed more uniformly; and during ion polishing, the included angle between the ion beam direction and the tangential direction of the contact edges of the two samples is controlled within-30-30 degrees, and back-and-forth swinging polishing is carried out. Compared with the preparation of a single inlaid sample, the method provided by the invention can grind the surface layer area more accurately. And the grinding direction during rough polishing and the tangential direction of the contact edge of the ion beam and the two samples during fine polishing are controlled within 30 degrees, so that the contact edge is stressed more uniformly, and the polishing is smoother. Belongs to the technical field of material analysis.

Description

technical field [0001] The invention relates to the improvement and innovation of an EBSD sample preparation method for metallographic samples, in particular to an EBSD sample preparation method for the edge region of metallographic samples, which is suitable for the preparation of high-resolution EBSD samples in the surface area of ​​a series of metallographic samples , belonging to the technical field of material analysis. Background technique [0002] Electron Backscatter Diffraction (EBSD) technology is a diffraction Kikuchi band pattern formed by the electron beam excited in the surface area of ​​the sample inclined at a large angle under a scanning electron microscope, so as to determine the information related to the crystal structure, orientation and grain boundary characteristics. [0003] In the process of EBSD data collection, the surface state of the sample is the key to EBSD data collection, that is, the surface of the EBSD sample should be flat, clean and free ...

AI Technical Summary

Problems solved by technology

However, the previous EBSD sample preparation method can obtain a better resolution rate for the center of the metallographic sample, but it is not very ideal on the surface or edge of the sample. The reasons are: (1) When the metallographic sample is mechanically ground, the sample The edge surface of the sample is preferentially subjected to a large force, resulting in a serious edge effect, that is, the surface of the sample is arc-shaped, the height is significantly lower than the central area of ​​the sample, and the scratches or wear marks on the surface area are difficult to eliminate; (2) mechanical polishing When grinding and polishing samples on sandpaper and polishing cloth, most sample preparation personnel habitually choose to polish in the direction of 90 degrees to the first pass after the first pass. The effect is better, but it is unfavorable for the rectangular sample and the surface area of ​​the sample; (3) during fine polishing, that is, ion polishing or vibration polishing, due to the edge effect of mechanical polishing, the surface area of ​​the sample is subjected to ion beam or vibration The influence of polishing is weak, and the stress and deformation of the surface layer are difficult to remove

In summary, EBSD sample preparation in the surface area of ​​metallographic samples is difficult and needs to be solved urgently

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