Graphene-based metamaterial waveguide phase dynamic modulator

Abstract

The invention provides a metasurface waveguide phase dynamic modulator based on graphene. The device is characterized in that the device is composed of a silicon waveguide I, a metasurface II composed of artificial microstructure metal units, and a double-layer graphene capacitor III; the double-layer graphene is separated by an insulating material hexagonal boron nitride; voltage is applied to a metal electrode, double-layer graphene forms a capacitor, it is guaranteed that voltages of all points of graphene are consistent, then the Fermi level of graphene is changed, and the effect of a metal structure unit on a light field is influenced; a signal light source enters from one end of the waveguide, passes through the phase modulation structure, namely the metal structure and the graphene, and then exits from a port in the other side, so that phase regulation and control of an output signal are realized. The optical switch can be used for a Mach-Zehnder interferometer or an annular resonator, realizes multiple functions of optical switching, filtering, wave selection, beam splitting and the like, and can be widely applied to the field of integration of micro-nano photonic devices.

Description

(1) Technical field [0001] The invention relates to a graphene-based superstructured waveguide phase dynamic modulator, which can be used in a Mach-Zehnder interferometer or a ring resonator to realize functions such as optical switching, beam splitting, filtering, and wave selection, and belongs to the field of photon integration . (2) Background technology [0002] The phase modulator is a key component for modulating high-speed optical signals in photonic integrated systems, and it is of great significance to guide the effective manipulation of electromagnetic waves. The waveguide is a low-loss transmission medium, which can confine electromagnetic waves in a closed space, and has the advantages of small size and easy integration. Therefore, a silicon waveguide with a large relative permittivity is often used to make a phase modulator. [0003] There are various methods of modulating the phase. Electro-optic modulators based on lithium niobate are technically large in ...

AI Technical Summary

Problems solved by technology

Chinese patent: 201910357092.1 discloses a silicon-based artificial microstructure metasurface waveguide coupler, which couples vertically incident light into the waveguide. Although it achieves a phase delay of 0-2π, it cannot control the light field transmitted in the waveguide; Chinese patent: 201711334825.7 discloses a waveguide structure based on metasurface-based chip laser radar phase control. Although it achieves large-angle phase control, it is not dynamically adjustable.

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