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Piezoelectric ceramic with laminated structure and preparation method and application thereof

A technology of piezoelectric ceramics and laminated structures, applied in the field of piezoelectric ceramics, can solve problems such as limited randomness of improvement, and achieve the effects of improved temperature stability, good performance, and easy control

Active Publication Date: 2022-03-08
GLOBAL ENERGY INTERCONNECTION RES INST CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007]Therefore, the technical problem to be solved by the present invention is to overcome the limited degree of improvement in the prior art of using element doping to improve the temperature stability of piezoelectric ceramics And has certain random defects, thereby providing a method for preparing piezoelectric ceramics with a laminated structure that significantly improves temperature stability while maintaining high electrical strain

Method used

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  • Piezoelectric ceramic with laminated structure and preparation method and application thereof
  • Piezoelectric ceramic with laminated structure and preparation method and application thereof
  • Piezoelectric ceramic with laminated structure and preparation method and application thereof

Examples

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Embodiment 1

[0041] Considering the optimization of the room temperature and the device’s normal heating temperature range of 25-75°C near the electrostrain and temperature stability of piezoelectric ceramics, the barium titanate system doped with Sn4+ and Hf4+ is selected, and the multiphase coexistence point of the two corresponds to the temperature They are 37°C and 70°C, respectively, so the combination of several components near the multiphase coexistence point improves the electrostrain and temperature stability of piezoelectric ceramics.

[0042] (1) For doped Sn 4+ The barium titanate system, namely Ba(Ti 1-x sn x )O 3 (BTS x ), x refers to BaSnO 3 The percentage of the total amount of substances, studies have shown that the corresponding component of the multi-phase coexistence point of the system is BTS 0.105 . For doped Hf 4+ The barium titanate system, namely Ba(Ti 1-y f y )O 3 (BTH y ), y refers to BaHfO 3 The percentage of the total amount of substances, studies hav...

Embodiment 2

[0058] The difference between this embodiment and embodiment 1 is that the step (8) in the above embodiment 1 is different. Specifically, in this embodiment, after the piezoelectric ceramic powder is laid layer by layer, the Pressed under pressure for 3 minutes to prepare a semi-finished product, other steps are the same as in Example 1.

Embodiment 3

[0060] The difference between this embodiment and embodiment 1 is that the step (8) in the above embodiment 1 is different, specifically, in this embodiment, weigh 0.3g of BTS 0.12 Pour it into a 10mm mold and pre-press it with a pressure of 2MPa for 0.5min to make the surface of the sample flat. On this basis, add BTS one by one at a time of 0.3g 0.105 、BTS 0.09 、BTH 0.13 、BTH 0.11 and BTH 0.09 The sample powder is pre-pressed in the same pre-pressing way. After all the ingredients are pre-pressed, keep it for 7 minutes for the last time. Put the pre-pressed sample into a latex bag and vacuumize it, then put it into a cold isostatic press and press it into a dense laminated structure ceramic sample with a pressure of 200 MPa, and the pressing time is 5 minutes.

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Abstract

The invention discloses piezoelectric ceramic with a laminated structure as well as a preparation method and application of the piezoelectric ceramic. The preparation method of the piezoelectric ceramic with the laminated structure comprises the following steps: obtaining raw material powder: obtaining piezoelectric ceramic powder of at least two systems with different Curie temperature points, taking corresponding components of multiphase coexistence points of the respective systems as cores, and respectively selecting the cores and components floating within 15% on the two sides of the cores as the piezoelectric ceramic powder; and preparing a finished product: superposing the piezoelectric ceramic powder layer by layer to form a semi-finished product with a laminated structure, sintering, cleaning, cutting and sputtering to prepare the finished product. The electrostrictive strain of the piezoelectric ceramic with the laminated structure prepared by the invention almost expresses relatively high electrostrictive strain in a single component at different temperatures, that is, the peak value of the piezoelectric ceramic with the laminated structure in the temperature range interval is equal to or even higher than the peak values of BTS0.105 piezoelectric ceramic and BTH0.11 piezoelectric ceramic, and the piezoelectric ceramic has a comprehensive effect.

Description

technical field [0001] The invention relates to the technical field of piezoelectric ceramics, in particular to a piezoelectric ceramic with a laminated structure and a preparation method and application thereof. Background technique [0002] Piezoelectric ceramics are often used as position regulators in optical and microelectronic systems, which often require them to generate large driving forces and mechanical strains under the excitation of an external electric field. A performance to make an accurate and intuitive assessment. [0003] The electro-induced strain of piezoelectric ceramics comes from three contributions: the first is the intrinsic nonlinear strain mechanism, which is derived from the electrostrictive effect of the material, caused by induced polarization, and exists in almost all dielectrics; the second The first is the inverse piezoelectric effect that only exists in non-centrosymmetric crystal materials, which is an intrinsic linear strain mechanism; th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/468C04B35/622C04B41/88H01L41/083H01L41/187H10N30/50H10N30/853
CPCC04B35/468C04B35/622C04B41/5116C04B41/88C04B41/009C04B2235/3293C04B2235/3244C04B2235/96H10N30/50H10N30/853C04B35/46C04B41/4543
Inventor 王妍陈川张熙民
Owner GLOBAL ENERGY INTERCONNECTION RES INST CO LTD
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