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3D multilayer supercapacitor with high dielectric constant and high power density and micromachining method

A technology with high dielectric constant and high power density, applied in the field of aerospace power supply, can solve the problems of insufficient energy density and inability to meet the battery life requirements of electric aircraft, and achieve the effect of high discharge power and large stored energy.

Active Publication Date: 2022-03-01
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although traditional supercapacitors (such as pseudocapacitors and two-electrode supercapacitors) have high power density, their energy density is insufficient to meet the endurance requirements of electric aircraft.

Method used

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  • 3D multilayer supercapacitor with high dielectric constant and high power density and micromachining method
  • 3D multilayer supercapacitor with high dielectric constant and high power density and micromachining method
  • 3D multilayer supercapacitor with high dielectric constant and high power density and micromachining method

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Embodiment Construction

[0046] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0047] Such as figure 1 As shown, it is a longitudinal cross-sectional schematic view of a 3D multilayer high dielectric constant high power density supercapacitor according to an embodiment of the present invention. A supercapacitor includes multiple capacitors, and the multiple capacitors are connected through the left electrode, the right electrode and the wiring layer. Each capacitor includes: a dielectric layer, a left metal layer and a right metal layer; the dielectric layer is placed at th...

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Abstract

The invention discloses a 3D multilayer high dielectric constant high power density supercapacitor, which comprises a plurality of capacitors, the plurality of capacitors are connected with a wiring layer through a left electrode and a right electrode, and each capacitor comprises a dielectric layer arranged at a silicon wafer; the left side metal layer is connected to the left side of the dielectric layer; the right side metal layer is connected to the right side of the dielectric layer; the left side metal layer, the dielectric layer and the right side metal layer are attached in a non-planar mode and stacked into multiple layers, and a 3D multilayer capacitor is formed. The super capacitor provided by the invention is a pure physical super capacitor, does not involve an ion-electron exchange chemical process in the discharge process, and is high in discharge power and large in storage energy.

Description

technical field [0001] The invention relates to the technical field of aerospace power supplies, in particular to a 3D multilayer high dielectric constant high power density supercapacitor and a micromachining method. Background technique [0002] For aviation electric energy, the core technology lies in high-efficiency airborne mobile power supply. Airborne power supply is a mobile power supply with high energy density, high power density, and high reliability, mainly including fuel cells, lithium batteries, and supercapacitors. [0003] By analyzing the energy, power and weight supply-demand energy ratio of several major types of aviation energy, the existing mobile power technology fails to meet the airworthiness requirements, especially in terms of power, the chemical battery is far inferior to that provided by industrial fuel, and the physical power exceeds that provided by industrial fuel. Capacitors can provide high power, but the capacity is too small and the delay i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01G11/12H01G11/84
CPCH01G11/12H01G11/84Y02E60/13
Inventor 段力
Owner SHANGHAI JIAO TONG UNIV
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